“…Microplasmas ecompase the adventages of low-pressure plasmas with the advenatges of being micro [1][2][3][4]. Due to their portability and the non-equilibrium character of the discharges, microplasmas are finding application in many research disciplines, from the optimizing the plasma screens [5], localized silicon etching [6], tunable UV source [7], gas spectroscopy [8,9], spectroscopy of water impurities [10], up to localized treatment of materials and assembly of nanostructures [11]. On the other hand, plasma-based microsystems can find application in bio microelectromechanical system (bio-MEMS) sterilization, small-scale materials processing and microchemical analysis systems [12].…”