Excimer laser ablation of Al2O3–TiC ceramics: laser induced modifications of surface topography and structure

Oliveira, V.; Vilar, R.; Conde, O.

doi:10.1016/s0169-4332(97)00751-4

Cited by 32 publications

(17 citation statements)

References 12 publications

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“…Conical structures grown in the direction of the incident laserbeam have already been observed in different materials [16][17][18]. Most of the models suppose that they are formed by preferential removal of the material surrounding the cones.…”

Section: Pulsed Laser Ablation -Depositionmentioning

confidence: 99%

Optimization of Cr₈O₂₁ targets for Pulsed Laser Deposition

Tortet¹,

Guinneton²,

Monnereau³

et al. 2005

Cryst. Res. Technol.

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This work describes the preparation of Cr 8 O 21 pellets with optimised mass density to be used as targets for Pulsed Laser Deposition (PLD) of chromium dioxide thin films. Cr 8 O 21 is synthesised by thermal decomposition of CrO 3 , at 270°C. An attempt to reduce the grain size of the Cr 8 O 21 powder to the nanometer scale has been made in order to increase the density of the pressed and sintered pellets serving as targets. The morphology of those starting fine powders as well as of targets (before and after laser ablation) and the corresponding thin films were characterized and studied using X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and Raman spectroscopy. The composition of the films is a mixture of crystallised Cr 2 O 3 and amorphous CrO 2 .

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Section: Pulsed Laser Ablation -Depositionmentioning

confidence: 99%

Optimization of Cr₈O₂₁ targets for Pulsed Laser Deposition

Tortet¹,

Guinneton²,

Monnereau³

et al. 2005

Cryst. Res. Technol.

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“…For micro structuring, however, primarily pulsed solid state [4,10], and Excimer-lasers [11][12][13] have been applied with pulse durations in the nanosecond, picosecond and femtosecond regime. However, due to the substantial progress, also fiber lasers have recently been employed to efficiently process ceramics [4,14].…”

Section: Introductionmentioning

confidence: 99%

“…In addition, evidence was found that polished samples have a lower surface roughness Ra after laser treatment being on the order of 0.25 to 0.4 μm. Also using a KrF laser, Oliveira et al worked on Al2O3-TiC ceramics (fluence between 2 and 8 J/cm²) and report on an increase of the surface roughness with increasing pulse number up to 200 pulses and an increase with fluence from 0.2 μm at 2 J/cm² and 0.7 μm at 8 J/cm³, respectively [12].…”

Section: Introductionmentioning

confidence: 99%

Micromachining of AlN and Al2O3 Using Fiber Laser

2014

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Abstract:We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm 2 for alumina and 18 J/cm 2 for aluminum nitride. The factors influencing the efficiency and quality of 3D micromachining, namely the surface roughness, the material removal rate and the ablation depth accuracy are determined as a function of laser repetition rate and pulse overlap. Using a fluence of 64 J/cm², we achieve a material removal rate of up to 94 mm³/h in Al2O3 and 135 mm³/h in AlN for high pulse overlaps (89% and 84%). A minimum roughness of 1.5 μm for alumina and 1.65 μm for aluminum nitride can be accomplished for medium pulse overlaps (42% to 56%). In addition, ablation depth deviation of the micromachining process of smaller than 8% for alumina and 2% for aluminum nitride are achieved. Based on these results, by structuring exemplarily 3D structures we demonstrate the potential of high quality and efficient 3D micromachining using pulsed fiber laser.

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“…Titanium carbide (TiC), a common hard alloy powder, was extensively utilized in Al 2 O 3 /TiC-and TiC-based cermets [1]. Al 2 O 3 /TiC composite with 50-70% alumina content has a wide application in cutting tools, wear resistance coating and computer pieces such as magnetic head sliders [2]. The reason of being under attention can be attributed to its special properties such as hardness, toughness, chemical stability, good strength, electrical conductivity and excellent wear resistance [3].…”

Section: Introductionmentioning

confidence: 99%

“…The reason of being under attention can be attributed to its special properties such as hardness, toughness, chemical stability, good strength, electrical conductivity and excellent wear resistance [3]. Currently, it is manufactured primarily by pressure less sintering or hot pressing the direct mixtures of Al 2 O 3 and TiC powders [4], mechanical alloying [5], pulsed laser deposition (PLD) [2], etc. Nowadays, combustion synthesis (CS) or self-propagating high temperature synthesis (SHS) has been one of the most important techniques for fabrication of cermet composites [3] such as Al 2 O 3 /TiC composite.…”

Section: Introductionmentioning

confidence: 99%