Excimer laser ablation of polymers and glasses for grating fabrication

Dyer, P. E.; Farley, Robert J.; Giedl, R.; Karnakis, Dimitris

doi:10.1016/0169-4332(95)00528-5

Cited by 68 publications

(28 citation statements)

References 29 publications

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“…The quality of the gratings is at least as good as the best previously reported gratings formed in polymers by direct writing methods. The gratings formed here are much deeper than the gratings described in Refs [356][357][358][359][360][361] or for single-pulse gratings in PI. Gratings with a spacing of 1 mm and a depth of about 80 nm could be achieved.…”

Section: Resultsmentioning

confidence: 96%

“…A completely different approach uses a photocurable monomer and a contact mask (using the volume contraction of the polymer and diffusion of the monomer into the polymerization area) [355]. Faster techniques for highly reproducible gratings use phase masks [356,357], Talbot interferometers [358,359], transmission gratings with imaging optics [360], and Michelson interferometers [361]. All of these techniques use laser fluences above a certain material-dependent threshold.…”

Section: Introductionmentioning

confidence: 99%

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Laser Application of Polymers

Lippert

2004

Polymers and Light

150

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Laser ablation of polymers has been studied with designed materials to evaluate the mechanism of ablation and the role of photochemically active groups on the ablation process, and to test possible applications of laser ablation and designed polymers. The incorporation of photochemically active groups lowers the threshold of ablation and allows high-quality structuring without contamination and modification of the remaining surface. The decomposition of the active chromophore takes place during the excitation pulse of the laser and gaseous products are ejected with supersonic velocity. Time-of-flight mass spectrometry reveals that a metastable species is among the products, suggesting that excited electronic states are involved in the ablation process. Experiments with a reference material, i.e., polyimide, for which a photothermal ablation mechanism has been suggested, exhibited pronounced differences. These results strongly suggest that, in case of designed polymers which contain photochemically active groups, a photochemical part in the ablation mechanism cannot be neglected. Various potential applications for laser ablation and the special photopolymers were evaluated and it became clear that the potential of laser ablation and specially designed material is in the field of microstructuring. Laser ablation can be used to fabricate three-dimensional elements, e.g., microoptical elements.Keywords Laser ablation · Ablation mechanism · Photopolymers · Polyimide · Spectroscopy This was not always true, of course. For many years, the laser was viewed as "an answer in search of a question". That is, it was seen as an elegant device, but one with no real useful application outside of fundamental scientific research. In the last two to three decades however, numerous laser applications have moved from the laboratory to the industrial workplace or the commercial market. Lasers are unique energy sources characterized by their spectral purity, spatial and temporal coherence, and high average peak intensity. Each of these characteristics has led to applications that take advantage of these qualities: -Spatial coherence: e.g., remote sensing, range finding and many holographic techniques. -Spectral purity: e.g., atmospheric monitoring based on high-resolution spectroscopies. -and of course the many other applications in communication and storage, e.g., CDs.All of these high-tech applications have come to define everyday life in the late twentieth century. One property of lasers, however, that of high intensity, did not immediately lead to "delicate" applications but rather to those requiring "brute force". That is, the laser was used in applications for removing material or heating. The first realistic applications involved cutting, drilling, and welding, and the laser was little more advanced than a saw, a drill, or a torch. In a humorous vein A.L. Schawlow proposed and demonstrated the first "laser eraser" in 1965 [4], using the different absorptivities of paper and ink to remove the ink without damaging the und...

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Section: Resultsmentioning

confidence: 96%

Section: Introductionmentioning

confidence: 99%

Laser Application of Polymers

Lippert

2004

Polymers and Light

150

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“…Dyer et. al (1996) estimated the ablation coefficient for glass using probe-beam deflection technique and proposed following Equation 4.2 (Dyer 1996):…”

Section: Excimer Laser 2d/3d Patterningmentioning

confidence: 99%

Micromachining of polyurethane (PU) polymer using a KrF excimer laser (248nm)

Singh

Sharma

2014

Applied Surface Science

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SUMMARYPolyurethane (PU) polymer, a thermoplastic material, melts when exposed to laser light due to a variety of primary and secondary structures. Pattern and/or inducing a significant chemical change of the surface of polyurethane impacts a number of technologies, such as tissue engineering, MEMS devices, semiconductor manufacturing.At present, polyurethane (PU) is considered to be a best compromise material available, in terms of biocompatibility, mechanical flexibility and strength. Excimer laser micromachining is an appropriate tool for an alternative approach to conventional machining. It is highly desirable to relate the material removal rate with etch rate and ablation depth for understanding the ablation dynamics. In this investigation, micromachining of polyurethane polymer is conducted using a short pulse (FWHM = 25 ns) KrF Excimer Laser (248 nm wavelength) that generates laser energy in the range of 100 to 650 mJ. The machined surfaces were examined using conventional optical microscopy, surface profilometer and laser interference optical microscope (MicroXAM).The influence of the operating parameters, such as input energy, number of pulses, and environment on resulting micromachined geometries is also studied. Simple as well as complex geometries, such as micro-fluidic channels, micro-gears, part geometries used in medical applications, and electrical circuits were micromachined.iii ACKNOWLEDGMENTS

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“…9 In another field, metallization of polymer materials remains crucial in materials science engineering, especially for data storage of information. 10 For example, an excimer laser in a photoablation procedure can be used to enhance adhesive properties of polymer-supported thin metallic films, 11 and permits to obtain micrometre resolved cavities on thin metallic/ polymer films. Owing to the fact that recent breakthroughs 6,12,13 were obtained in the synthesis and architecturing of nanomaterials, it would be interesting to integrate these materials into polymer microchannels.…”

mentioning

confidence: 99%

Polycarbonate microchannel network with carpet of Gold NanoWires as SERS-active device

et al. 2009

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A polycarbonate (PC) microchannel network supporting gold nanowires was developed to be a SERSactive microchip. Observations of large increases in a Raman cross-section, allowed us to collect vibrational signatures which are not easily detectable by Raman techniques due to the high fluorescence level of bare PC. Compared to other SERS experiments, this study relies on the use of dielectric polymer/metal surfaces which are well defined at microscale and nanoscale levels. This device seems a promising tool for sensing the adsorption of biomolecules.In the last few years, polymer microchips have become highly desirable for on-site detection in areas such as life science, environment, food, and medicine. Until now, optical techniques were privileged due to their sensitivity and their non-destructive character. In this context, Surface-Enhanced Raman Scattering (SERS) is one of the most sensitive techniques for single molecule detection with regard to its molecular selectivity and specificity. 1 With the same objective, Surface-Enhanced Hyper-Raman Scattering (SEHRS) was recently performed for applications of vibrational spectroscopy in biology. 2 There is an abundant literature regarding SERS active substrates of silver or gold thin films (see for example ref. 3, 4). Among the various methods used for structuring surfaces, nanolithography 5 and colloid adsorption 6-8 appear as the main two ones. Molecules adsorbed onto these nanostructured surfaces have shown an increase in enhancement factors of the order of 1 Â 10 6 to 1 Â 10 12 in terms of SERS efficiency. Following the latest published work on SERS nanoparticle tags, several groups have reached 1 Â 10 15 in terms of efficiency using, as an example, a polymer encapsulation layer. 9 In another field, metallization of polymer materials remains crucial in materials science engineering, especially for data storage of information. 10 For example, an excimer laser in a photoablation procedure can be used to enhance adhesive properties of polymer-supported thin metallic films, 11 and permits to obtain micrometre resolved cavities on thin metallic/ polymer films. Owing to the fact that recent breakthroughs 6,12,13 were obtained in the synthesis and architecturing of nanomaterials, it would be interesting to integrate these materials into polymer microchannels.A preliminary surface-enhanced Raman scattering investigation for a polymer microchip containing gold nanowires arrays is presented here. As illustrated in Fig. 1A, in order to integrate the nanowires into a microchannel, we synthesized gold nanowires using the electrocrystallization method into a track etched polycarbonate (30 mm thick) with an appropriate pore size and film thickness. Once this template filled, two layers of polyethyleneterephthalate (35 mm thick) were thermally laminated on both sides of PC (see PET1 and PET2 in Fig. 1A). The PET/PC gold nanowire/PET system was exposed to an ArF excimer laser beam in order to create a deep cavity reaching the polycarbonate surface. The polycarbonate was partially...

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Excimer laser ablation of polymers and glasses for grating fabrication

Cited by 68 publications

References 29 publications

Laser Application of Polymers

Laser Application of Polymers

Micromachining of polyurethane (PU) polymer using a KrF excimer laser (248nm)

Polycarbonate microchannel network with carpet of Gold NanoWires as SERS-active device

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