Excimer laser gas usage reduction technology for semiconductor manufacturing

Yashiro, Masanori; Oouchi, Takuma; Tsushima, Hiroaki; Kurosu, Akihiko; Ohta, Takao; Mutoh, T.; Mizoguchi, Hideaki

doi:10.1117/12.2257972

Cited by 3 publications

(2 citation statements)

References 1 publication

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“…Various methods have been used to fabricate the microfluidic chips, including photolithography, soft lithography, laser etching, hot embossing, and machining process. As a well-developed technique, photolithography enables the micro/nano structures with a high resolution[ 16 ]. The extreme ultraviolet (EUV) lithography enables the fabrication of microstructures down to 10 nm[ 17 ].…”

Section: The Structures Of Heart-on-a-chipmentioning

confidence: 99%

Fabrication and Biomedical Applications of Heart-on-a-chip

Yang

Xiao

et al. 2024

IJB

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Heart diseases have become the main killer threatening human health, and various methods have been developed to study heart disease. Among them, heart-on-a-chip has emerged in recent years as a method for constructing disease (or normal) models in vitro and is considered as a promising tool to study heart diseases. Compared with other methods, the advantages of heart-on-a-chip include the high portability, high throughput, and the capability to mimic microenvironments in vivo. It has shown a great potential in disease mechanism study and drug screening. In this paper, we review the recent advances in heart on-a-chip, including the fabrication methods (e.g., 3D bioprinting) and biomedical applications. By analyzing the structure of the existing heart-on-a-chip, we proposed that a highly integrated heart-on-a-chip includes four elements: Microfluidic chips, cells/microtissues, microactuators to construct the microenvironment, and microsensors for results readout. Finally, the current challenges and future directions of heart-on-a-chip are discussed.

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Section: The Structures Of Heart-on-a-chipmentioning

confidence: 99%

Fabrication and Biomedical Applications of Heart-on-a-chip

Yang

Xiao

et al. 2024

IJB

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“…From the different commercially available laser configurations, excimer lasers are the most used NLA technologies in the silicon industry 88 , with increasing importance as light sources for photolithography processes 89 . They rely on the relaxation process of previously excited groups of atoms called excited dimers (hence the excimer denomination) to produce monochromatic coherent light beams, which are focused at the output to increase the effective laser energy density (commonly referred to "laser fluence").…”

Section: Nanosecond Laser Annealing Processmentioning

confidence: 99%

Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals

Álvarez¹

2021

Springer Theses

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I also have to thank many people from France, where I spent six wonderful months of my life doing my internship in STMicroelectronics. I felt very welcome from the first day. Although not from France, thanks to Rodrigo Blasco, classmate from the Master's degree, who introduced some very good friends in Grenoble: Akhil, Marion, Nathaniel, Mada, Saptarshi, with whom I have shared great moments. To my neighbours David Bastian and Clarie Paris, because they saved me from really awful moments up there in France. They welcomed me as a friend when I could not even speak French. At STMicroelectronics, to all the people that made possible the project, in special to François Roy and Olivier Noblanc, for believing in the project from the first day. The huge time dedication and effort of my workmates must be acknowledged as well: Andrej Suler, Boris Rodrigues, Sonnarith Chhun, Thomas Dalleau, Romuald, Bastien, Carlos, Nils, Yolenne, and so many people from the fabrication and characterisation processes, which pushed the wafers into the fab to deliver them on time. Finally, from CEA-LETI (Grenoble), special thanks to Sébastien Kerdiles and Pablo Acosta Alba. They were always helpful and I could learn most of my knowledge regarding the recrystallization processes and laser interaction with matter, opening a new and fascinating world to me.

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Nd:YAG infrared laser as a viable alternative to excimer laser: YBCO case study

Chaluvadi

Chalil

Mazzola

et al. 2023

Sci Rep

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We report on the growth and characterization of epitaxial YBa$$_{2}$$ 2 Cu$$_{3}$$ 3 O$$_{7-\delta }$$ 7 - δ (YBCO) complex oxide thin films and related heterostructures exclusively by Pulsed Laser Deposition (PLD) and using first harmonic Nd:Y$$_{3}$$ 3 Al$$_{5}$$ 5 O$$_{12}$$ 12 (Nd:YAG) pulsed laser source ($$\lambda$$ λ = 1064 nm). High-quality epitaxial YBCO thin film heterostructures display superconducting properties with transition temperature $$\sim$$ ∼ 80 K. Compared with the excimer lasers, when using Nd:YAG lasers, the optimal growth conditions are achieved at a large target-to-substrate distance d. These results clearly demonstrate the potential use of the first harmonic Nd:YAG laser source as an alternative to the excimer lasers for the PLD thin film community. Its compactness as well as the absence of any safety issues related to poisonous gas represent a major breakthrough in the deposition of complex multi-element compounds in form of thin films.

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Excimer laser gas usage reduction technology for semiconductor manufacturing

Cited by 3 publications

References 1 publication

Fabrication and Biomedical Applications of Heart-on-a-chip

Fabrication and Biomedical Applications of Heart-on-a-chip

Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals

Nd:YAG infrared laser as a viable alternative to excimer laser: YBCO case study

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