Excimer Laser Micromachining Using Binary Mask Projection for Large Area Patterning With Single Micrometer Features

Dayal, Govind; Akhtar, Syed Nadeem; Ramakrishna, S. Anantha; Ramkumar, J.

doi:10.1115/1.4024880

Cited by 14 publications

(12 citation statements)

References 20 publications

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“…High energy pulses break a large number of C-C bonds but over the same polymer mass (albeit into smaller polycarbon fragments that explode out) leading to almost the same etch depth. Hence beyond a particular pulse energy (fluence) the efficiency of photolytic ablation levels off (Dayal et al 2013). …”

Section: Ablation Rate and Thresholdmentioning

confidence: 98%

Fabrication of Micro Lens Array by Excimer Laser Micromachining

Akhtar

Sharma

Ramkumar

2015

Lasers Based Manufacturing

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Micro Lens arrays are widely used in optical devices such as photo-sensors, digital projectors, photovoltaic cells, 3D imaging etc. These have traditionally been fabricated by photolithography, moulding and embossing, reactive ion etching and electroforming. These processes are wet processes and require expensive setup and running cost. A novel method is presented in this work that allows fabrication of micro lens array using excimer laser micromachining. The fabrication has been done using mask projection with work piece scanning. A KrF excimer laser has been used to micro machine lenses on a poly (methyl methacrylate) substrate. The surface profile of the lens array is measured and then related to the laser-material coupling and the energy of the laser pulses. Using this method, it is possible to fabricate micro lenses down to a diameter of 5 µm over a considerably large area.

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Section: Ablation Rate and Thresholdmentioning

confidence: 98%

Fabrication of Micro Lens Array by Excimer Laser Micromachining

Akhtar

Sharma

Ramkumar

2015

Lasers Based Manufacturing

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“…LST is a process for micro and macro parts, and it can machine with a high level of accuracy, precision and repeatability. 27 Dayal et al 27 proposed texturing on polymer using excimer laser by employing binary mask projection technique to reproduce the mask features from the millimeter to the micrometer range. Large arrays of 1- and 15-µm holes on Kapton are made with high resolution and uniform periodicity as shown in Figure 7.…”

Section: Introductionmentioning

confidence: 99%

“…These large-scale arrays have a total array area of 1 mm × 31 mm with excellent uniformity throughout. 27…”

Section: Introductionmentioning

confidence: 99%

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Micro texturing on metallic surfaces: State of the art

Patel

Jain

Ramkumar

2016

Proceedings of the Institution of Mechanical Engineers, Part B:

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The study of surface texturing on a metallic surface has become a great area of interest of researchers in the last few decades. Surface texturing is employed for enhancing the performance of the surface in its working environment. As the characterization techniques have been evolving very fast, researchers have started mimicking the natural surfaces to take the advantages of their characteristics (such as self-cleaning, load capacity, reducing coefficient of friction). Manufacturing of natural inspired surface requires having a great control over the process to achieve the micro or nano features on the natural surfaces. Hence, the selection of the most suitable process and optimum parameters for machining of arrays of micro or nano features at large scale is highly desirable. This study reports an overview of different micromachining processes used for texturing on metallic surfaces and research gaps to be filled in the available literature. Electrochemical micromachining has tremendous potential on account of its versatility in different applications. It is a promising and economically viable machining process for micromanufacturing industries for fabrication of micro textures and micro features on metallic surfaces. Production of textured surface at large scale requires a sustainable technology, which can serve the purpose of enhancing the performance of the surface without changing the original properties of the surface. Indeed, laser surface texturing, through-mask electrochemical micromachining, lithography, micro-or nanocasting and so on are the existing methods which involve multiple steps for generation of textured surfaces. This article also reports some original experimental investigations for generation of different kinds of micro textures on metallic surfaces, namely, arrays of micro dimples, micro channels and micro pillars using a single-step maskless electrochemical micro-texturing process with a pre-patterned micro tool.

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“…Reduction of the droplet-surface contact area can be altered by micro/nanoscale texturing of the surface. Texturing of micro/ nanofeatures on surfaces has been achieved by micromachining [11], laser material processing [12][13][14][15], electrochemical etching [16], sandblasting [17], chemical vapor deposition [18], photolithography [19], and anodization [20].…”

Section: Introductionmentioning

confidence: 99%

Improving Surface Hydrophobicity by Microrolling-Based Texturing

Saxena

Ehmann

et al. 2016

Journal of Micro and Nano-Manufacturing

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A two-pass microrolling-based texturing (μRT) process was utilized to improve the hydrophobicity of aluminum surfaces. Square micropillars were fabricated on aluminum sheets by two mutually orthogonal forming passes by a roller pretextured with microgrooves. Subsequently, the droplet contact angle was measured to evaluate the hydrophobicity of the surface. Results show that surfaces with μRT-imprinted textures have higher contact angles than nontextured surfaces indicating improved hydrophobicity. Furthermore, the process has led to the creation of hierarchical valleylike features on top of each of the micropillars caused by the pile-up effect during the forming process. It was hypothesized that such hierarchical features positively contribute to the improved hydrophobicity of the surface. This hypothesis was validated by testing surfaces with a similar hierarchical textured pattern produced by laser-induced plasma micromachining (LIPMM). The effects of various aspects of texture geometry including surface area-to-volume ratio and groove aspect ratio on the surface contact angle and the anisotropy of the contact angles were investigated.

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Excimer Laser Micromachining Using Binary Mask Projection for Large Area Patterning With Single Micrometer Features

Cited by 14 publications

References 20 publications

Fabrication of Micro Lens Array by Excimer Laser Micromachining

Fabrication of Micro Lens Array by Excimer Laser Micromachining

Micro texturing on metallic surfaces: State of the art

Improving Surface Hydrophobicity by Microrolling-Based Texturing

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