Excimer laser photolysis of molybdenum hexacarbonyl with buffer gas

Radloff, W.; Hohmann, H.; Ritze, H.‐H.; Paul, R.

doi:10.1007/bf00324177

Cited by 6 publications

(1 citation statement)

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“…In the first half of this century, new binary metal carbonyls of most of the transition elements were discovered, and each in turn was explored as a potential CVD precursor. Although Fe(CO) 5 and Co 2 (CO) 8 give reasonably pure iron [11 -13] and cobalt [14,15] metal at 200°C, other metal carbonyls such as chromium, molybdenum, or tungsten hexacarbonyl generally deposit films that contain mixtures of the pure metal, the metal oxide, the metal carbide, and graphitic carbon [16][17][18][19][20][21][22][23][24][25][26][27]. This is quite understandable, since carbon monoxide readily chemisorbs on most metal surfaces to give surface-bound oxygen and carbon atoms, which under CVD conditions become incorporated into the growing film.…”

Section: Carbonylsmentioning

confidence: 99%

Low Temperature MoCVD Routes to Thin Films from Transition Metal Precursors

Girolami

Gozum

1989

MRS Proc.

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A review is presented of early and recent advances in the metal-organic chemical vapor deposition (MOCVD) of thin films from organotransition metal and related precursors. Routes to pure metals and alloys, metal carbides, metal borides, metal nitrides, metal silicides, and related materials will be summarized. Also included is a discussion of both the advantages and disadvantages of employing metal-organic precursors that contain transition elements.

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