2000
DOI: 10.1109/2944.902155
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Excimer laser technology development

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Cited by 48 publications
(26 citation statements)
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“…Electronic transitions from a bound excited state to a lower-lying repulsive state in excimer (excited dimer) molecules can be used as vacuum ultraviolet radiation sources [1,2].…”
Section: Introductionmentioning
confidence: 99%
“…Electronic transitions from a bound excited state to a lower-lying repulsive state in excimer (excited dimer) molecules can be used as vacuum ultraviolet radiation sources [1,2].…”
Section: Introductionmentioning
confidence: 99%
“…Rare-gas dimers have attracted scientific interest as a potential source of continuous radiation in the vacuum ultraviolet (VUV) region of the electromagnetic spectrum [1,2]. The dimers are model systems for studying atomatom interactions [3] and represent a starting point to describe the properties of larger rare-gas clusters [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…The predominant laser sources available in the UV region are excimer lasers, ion lasers, and free-electron lasers, with the associated limitations of non-solid-state design, bulky and complex architecture, large power comsumption, and high cost [2]. As such, an effective alternative approach for UV generation has been based on nonlinear frequency conversion techniques of secondharmonic-generation (SHG) [3,4] and sum-frequency-generation (SFG) [5,6] in suitable birefringent crystals, providing practical UV output powers.…”
Section: Introductionmentioning
confidence: 99%