Expanding plasma used for plasma deposition

Abstract

Abstract

Quality improvement of plasma-beam-deposited amorphous hydrogenated carbon with higher growth rate

“…At higher growth rate, saturation of the hardness is observed. In figure 3(d ) the hardness is plotted as a function of the inverse energy coefficient and the observed behaviour is again in agreement with earlier observations [6].…”

“…At the Eindhoven University of Technology, a deposition technique has been developed which is based on an expanding thermal plasma [6]. With this technique carbon films have been deposited, varying from amorphous hydrogenated films [7] to graphite [8], diamond [9] and fluorohydrogenated films [10,11].…”

Anomalous Atomic Hydrogen Shock Pattern in a Supersonic Plasma Jet

“…As can be seen from particles from the jet will lose their forward momentum more efficiently at higher pressure. The hydrogen drift velocity profile is very similar to that of argon measured in a pure argon plasma beam [16] which implies that the flow characteristics of the plasma beam are mainly determined by the argon atoms.…”

Diagnostics of a Hydrocarbon Plasma Jet Using the A2Δ-X2Π System of CH

“…' In a wall-stabilised arc (cascade arc of the Maecker type) an argon plasma is created at sub-atmospheric pressure [3] with a current of 20-100 A [5]. After passing a nozzle the plasma expands in a deposition chamber at a significantly lower pressure (10-1000 Pa) [6].…”

“…Applications of low temperature plasmas are of great importance: treatment of exhaust gases [1], thin film deposition (a-C:H, diamond, graphite) [2,3], hydrocarbon processing [4], and others. These plasmas present deviations from the thermal equilibrium, and consequently, elaborate spectroscopic analyses are difficult to perform.…”