Experimental and calculated range moments of deep implants

Profile of implanted in potassium titanyl phosphate by the , C nuclear reaction

“…From figure 1 it is found that the TRIM'91 code describes the shape of the front part of the experimental depth distribution of H in KTiPO 4 well, but does not describe the shape of the deep side of the depth distribution. Also this phenomenon is similar to the report by Weiser et al [15] for the concentration profile of 0.17 MeV 1 H implant in amorphous silicon by the H( 15 N, α) 12 C nuclear reaction. This phenomenon is similar to the case of 500 keV B + implanted into Si by Fink et al [16].…”

“…Figure 1 shows the concentration distribution versus the depth of 40 keV H + implanted into KTiOPO 4 by the 15 N nuclear reaction method. The distribution is nearly Gaussian, but slightly asymmetric.…”

“…Analysis for hydrogen is difficult or impossible using most traditional analytical methods. By the mid-1970s, Lanford working with Ziegler and co-workers at IBM developed the 15 N resonant nuclear reaction to analyse the hydrogen profile [12,13].…”

“…However, energy straggling is usually much less important when hydrogen profiling is performed with heavy ion induced nuclear reactions. It is usually a small perturbation in 15 N nuclear reaction profiling data. The sensitivity is better than one part per thousand.…”

“…N + 1 H − 12 C + 4 He + gamma-ray (4.43 MeV).To use this nuclear reaction to probe for hydrogen, a beam of15 N 2+ ions is incident on the sample and the yield of characteristic gamma-rays is measured. There is 0022-3727/98/172191+04$19.50 c 1998 IOP Publishing Ltd…”