Experimental and Simulated Results of Room Temperature Single Electron Transistor Formed by AFM Nano-Oxidation Process

Gotoh, Yuki; Matsumoto, Kazuhiko; Bubanja, Vladimir; Vázquez, Francisco Manteiga; Maeda, T.; Harris, James S.

doi:10.7567/ssdm.1999.d-5-2

Extended Abstracts of the 1999 International Conference on Solid State Devices and Materials 1999

DOI: 10.7567/ssdm.1999.d-5-2

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Experimental and Simulated Results of Room Temperature Single Electron Transistor Formed by AFM Nano-Oxidation Process

Yuki Gotoh¹,

Kazuhiko Matsumoto²,

Vladimir Bubanja³

et al.

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Experimental and Simulated Results of Room Temperature Single Electron Transistor Formed by AFM Nano-Oxidation Process

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