Experimental and theoretical analysis of the laser shock cleaning process for nanoscale particle removal

Kim, Dongsik; Oh, Bonggi; Jang, Dong-Hoon; Lee, Jeong-Wook; Lee, Jong-Myoung

doi:10.1016/j.apsusc.2007.02.119

Cited by 18 publications

(8 citation statements)

References 11 publications

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“…The velocity field governs the particle movement after detachment of the particle from the surface, thus being central to the analysis of the re-deposition problem [7]. Our on-going experimental work to visualize the particle trajectory indicates that the particle motion lasts for a substantially long time, up to milliseconds, with complicated flow structure in the downstream of the shockwave.…”

Section: Velocity Field and Particle Behaviormentioning

confidence: 99%

“…The methods of surface cleaning using the laser-induced shockwaves have recently attracted considerable attention since these offer potential to remove micro/nanoscale contaminant particles from solid surfaces in the semiconductor industry [1][2][3][4][5][6][7]. The laser shock cleaning (LSC) process is not only a dry but also a non-contact technique without exposure of the surface to direct mechanical contact or chemical reaction.…”

Section: Introductionmentioning

confidence: 99%

“…A series of investigations were previously performed to analyze the hydrodynamics associated with the LSC process [1,3,[5][6][7]. The blast wave theory was employed to simulate the laser-produced shockwave [6].…”

Section: Introductionmentioning

confidence: 99%

“…However, as the study was based on the simple blast wave theory [8], several key aspects of the process, especially the asymmetry of the shockwave shape and thus the inhomogeneous spatial distribution of the cleaning efficiency, could not be explained theoretically. More recently, we proposed a two-dimensional theoretical model for simulating the laser-induced breakdown and demonstrated that it can simulate the hydrodynamic phenomena occurring in the LSC process [7]. Numerical simulation based on the model revealed the physical mechanisms of the asymmetric shockwave generation.…”

Section: Introductionmentioning

confidence: 99%

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Numerical Simulation of Laser Shock Cleaning Process for Micro-Scale Particle Removal

Lee

Lee³

et al. 2008

Journal of Adhesion Science and Technology

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Recent studies have demonstrated that micro/nano-scale particles can be removed effectively from solid surfaces by laser-induced plasma shockwaves. This work proposes a two-dimensional theoretical model for numerical simulation of the hydrodynamics and particle behavior in the laser shock cleaning process. The spatial variation of the cleaning efficiency on the surface and the pressure/temperature/velocity fields are analyzed by numerical simulation. Furthermore, the model predicts the trajectory of the detached particles after the shockwave passage. Parametric studies are conducted to examine the effect of such process parameters as the laser pulse energy and the spot size on the cleaning process, with discussion of optimal cleaning conditions.  Koninklijke Brill NV, Leiden, 2008

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Section: Velocity Field and Particle Behaviormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Numerical Simulation of Laser Shock Cleaning Process for Micro-Scale Particle Removal

Lee

Lee³

et al. 2008

Journal of Adhesion Science and Technology

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“…Research by Tsunemi [2] and Zhou [3] portrayed the laser process as an ablation effect. Bloisi [4] and Kim [5] highlighted the application of a thermoelastic vibration model in laser cleaning. Yang [6] investigated the influence of thermal stress during the laser paint removal process and found that paint absorbed laser energy, formed a large temperature gradient, and was finally removed by thermal stress.…”

Section: Introductionmentioning

confidence: 99%

Paint Removal with Pulsed Laser: Theory Simulation and Mechanism Analysis

Zhao¹,

Qiao²,

Du³

et al. 2019

Applied Sciences

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Featured Application: Authors are encouraged to provide a concise description of the specific application or a potential application of the work. This section is not mandatory.Abstract: This paper studies paint removal using laser technology. A finite element model was created using COMSOL Multiphysics software, and the temperature field generated during the cleaning process was analyzed and verified. Laser paint removal behavior was investigated using a fiber laser, and its mechanism studied by combining Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and scanning electron microscopy. In-depth analysis of this relatively new technology could provide the theoretical basis for industrial application. The results of this study show that, when compared to the original paint layer, the infrared absorption spectrum of the cleaned surface had two additional two peaks-1333.36 cm −1 and 678.82 cm −1 . In addition, there was a decrease in C element content on the treated surface and an increase in O content. In addition, new organic and complex compounds were formed on the cleaned surface as a result of bond cleavage and rearrangement. Furthermore, paint particles of varying sizes and shapes were produced by the impact of plasma shock. Under high-energy laser irradiation, the paint layer underwent combustion, resulting in spherical nanoparticles of uniform shape.

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