2010
DOI: 10.1134/s0036023610130036
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Experimental and theoretical determination of the saturation vapor pressure of silicon in a wide range of temperatures

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Cited by 24 publications
(34 citation statements)
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“…According to the results reported in Figure 6, it can be seen that the dimers/atoms ratio is quite stable and reaches a plateau around the value 0.05; on the other side, the trimers/dimers ratio is less regular and is characterized by remarkable oscillations, mainly due to statistical reasons (lower absolute number of trimers in the simulation box during the dynamics); nevertheless, we can estimate that the latter ratio oscillates around the value 0.10 during the simulation. The obtained values of the ratios are in qualitative agreement with the data of Reference [46], which reports a dimers/atoms ratio of about 0.11 and a trimers/dimers ratio of about 0.25 at the considered values of temperature and pressure. Figure 6.…”
Section: Resultssupporting
confidence: 81%
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“…According to the results reported in Figure 6, it can be seen that the dimers/atoms ratio is quite stable and reaches a plateau around the value 0.05; on the other side, the trimers/dimers ratio is less regular and is characterized by remarkable oscillations, mainly due to statistical reasons (lower absolute number of trimers in the simulation box during the dynamics); nevertheless, we can estimate that the latter ratio oscillates around the value 0.10 during the simulation. The obtained values of the ratios are in qualitative agreement with the data of Reference [46], which reports a dimers/atoms ratio of about 0.11 and a trimers/dimers ratio of about 0.25 at the considered values of temperature and pressure. Figure 6.…”
Section: Resultssupporting
confidence: 81%
“…This behaviour could be due to an instability of the trimer that originates a bottleneck in the growth process [44], as this nuclearity is a mandatory step in the growth of larger aggregates, due to the fact that the formation of a tetramer due to the aggreagtion of two dimers is a very unlikely event in the present conditions. To conclude, we compare the results of the present MD simulations with the ND FF and the only-to our knowledge-work in the literature reporting the values of partial pressures of small Si N clusters (N = 1-6) in the vapour phase in equilibrium with the Si liquid phase calculated on the basis of classical thermodynamics [46]. In order to compare with the reported data, in Figure 6 we have plotted the ratio between the numbers of dimers and single atoms vs. the ratio between the number of trimers and dimers as a function of the simulation time.…”
Section: Resultsmentioning
confidence: 99%
“…The main feature is that the sputtering increases strongly with molecular mass; in addition, all PKAs, SKAs and TKAs are ejected in meaningful quantities. The average energies of the ejected PKAs and SKAs are similar, and comparable to the surface binding energy of silicon (estimated to be 4.67 eV, the value of the standard enthalpy of formation of Si(g)), 19 while the average energies of the ejected TKAs are smaller; this is consistent with the lower fraction of ejected TKAs respect to their total numbers. Fig.…”
Section: Impact Phenomenologysupporting
confidence: 70%
“…As shown in HRTEM ( Figure 1b) and SEM (Supporting Information Figure S2) images with EDX, resulting Type-G SiGe NWs retained the morphology of the NW with high crystallinity after thermal annealing and did not show the change of Si atomic composition because of nearly zero vapor pressure of Si at our annealing condition. 19 However, Type-G SiGe NW showed a distinct difference in concentration depth profile. The concentration of Si is significantly increased to exceed that of Ge at the surface of the NW and gradually decreased toward the core region (Figure 1d), which is consistent with scanning transmission electron spectroscopy (STEM)-EDX profile of Type-G SiGe NW (Supporting Information Figure S3); this trend is typically observed in segregated elements of binary alloy systems.…”
mentioning
confidence: 99%