“…Among many nanomaterials, two-dimensional (2D) materials have emerged as promising candidates for mechanical and optoelectronic applications [1][2][3]. Especially, graphene with an atomically thin structure (atomlayers distance of ∼0.335 nm) exhibits a higher rigidity than steel (specific surface area of 2500 m 2 /g), a stronger conductivity than copper [4][5][6], remarkable mechanical and photoelectric properties (young's modulus of up to ∼1 TPa and charge-carrier mobility up to 20000 cm 2 v −1 s −1 ) [7][8][9][10][11], and a special experiment ductility (20%) [12,13], thus making it an ideal candidate for micro-and nanoelectromechanical systems (MEMS and NEMS) [14][15][16][17]. In addition, the suspended graphene material eliminates the interaction with the substrate, and give them the freedom of movement, which makes it has been widely used in applications of MEMS devices [18][19][20][21][22], such as mechanical resonators [23,24], high performance sensors [25][26][27][28][29][30], electronic switches [31,32], microphones [33], and high resolution displays [34][35][36].…”