In exact analyses of bodies in the elastic–plastic regime, the behavior of the material above critical stress values plays a key role. In addition, under cyclic stress, important phenomena to be taken into account are the various types of hardening and the design of the material or structure. In this process, it is important to define several groups of characteristics. These include, for instance, the initial area of plasticity or load which defines the interface between elastic and plastic deformation area. The characteristics also include the relevant law of plastic deformation which specifies the velocity direction of plastic deformation during plastic deformation. In the hardening condition, it is also important to determine the position, size and shape of the subsequent loading area. The elasto-plastic theory was used for the analysis of special compliant mechanisms that are applied for positioning of extremely precise members of the Compact Linear Collider (CLIC), e.g., cryomagnets, laser equipment, etc. Different types of deformation hardening were used to simulate the behavior of particular structural elements in the elastic–plastic regime. Obtained values of stresses and deformations may be used in further practical applications or as default values in other strain hardening model simulations.