The process of scanning a focused light beam by a metal coated fiber probe with a subwavelength aperture is simulated using the finite element method for the two and three dimensional cases. Intensity pic tures of a focal spot are obtained. For various configurations of the probes, sensitivity to electromagnetic components is investigated. Qualitative differences in the results of the two and three dimensional simula tion are discussed. In the two dimensional case, the probe response is found to be independent of the aperture size. However, in the three dimensional case, the probe response depends heavily on the aperture diameter.