Polarization induced degenerate n-type doping with electron concentrations up to ∼10 20 cm −3 is achieved in graded Al x Ga 1−x N layers (x: 0%→37%) grown on unintentionally doped and on n-doped GaN:Si buffer/reservoir layers by metal organic vapor phase epitaxy. High resolution x-ray diffraction, transmission electron microscopy and electron energy loss spectroscopy confirm the gradient in the composition of the Al x Ga 1−x N layers, while magnetotransport studies reveal the formation of a three dimensional electron slab, whose conductivity can be adjusted through the GaN(:Si) buffer/reservoir. * rajdeep.adhikari@jku.at † alberta.