2011
DOI: 10.1088/0022-3727/44/25/255203
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Experimental evaluation of CaO, SrO and BaO sputtering yields by Ne+ or Xe+ ions

Abstract: Barrier coating materials used in plasma display panel (PDP) cells strongly affect the discharge voltages. Although magnesium oxide (MgO) is widely used for barrier coating in the current generation of commercial PDP cells, other alkaline earth oxides have been studied as alternatives and indeed some of them are now known to have lower discharge breakdown voltages for PDP cells, which would increase the energy efficiency of the cells. On the other hand, the resistance against physical sputtering is another cri… Show more

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Cited by 19 publications
(17 citation statements)
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“…In this subsection, the relative difference between the sputtering yields of CaO, SrO, and BaO thin films computed by SRIM and experimental data is plotted in Figure . This figure shows the relation between sputtering yield (At./ion) and ion energy (eV) of two Ne + and Xe + ions at normal incidence.…”
Section: Resultsmentioning
confidence: 99%
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“…In this subsection, the relative difference between the sputtering yields of CaO, SrO, and BaO thin films computed by SRIM and experimental data is plotted in Figure . This figure shows the relation between sputtering yield (At./ion) and ion energy (eV) of two Ne + and Xe + ions at normal incidence.…”
Section: Resultsmentioning
confidence: 99%
“…Then, in our calculations, the input densities of MgO, CaO, SrO, and BaO were 3.4, 3.34, 5.04, and 5.99 g/cm 3 , respectively, the mass of which was 40.3, 56.1, 103.6, and 153.3 amu, respectively, and the input thickness of the films was typically 5000 trueÅ except the MgO having a thickness of 10 000 trueÅ . As an input for E s of these protective layers, we have generally used the heats of sublimation, which were 6.73, 7.16, 6.29, and 4.8 eV, respectively, the same values as listed in Yoshimura et al However, experimental densities for different compounds were unavailable for α‐Al 2 O 3 /XO, TiO 2 /XO, and Al 2 TiO 5 /XO (X = Mg, Ca, Sr, and Ba). Hence, the densities were calculated using the equation expressed as follows: ρtarget material=mlayer1+mlayer0.25em2vlayer1+vlayer0.25em2. …”
Section: Computational Methodologymentioning
confidence: 99%
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