Experimental investigation of ECDM for fabricating micro structures of quartz

Nguyen, Khac-Ha; Lee, Pyeong An; Kim, Bo Hyun

doi:10.1007/s12541-015-0001-9

Cited by 75 publications

(22 citation statements)

References 14 publications

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“…According to the previous research literature [19][20][21][22], the tungsten carbide electrode was selected. According to the research of Fang et al [23], in wire electrochemical discharge machining (WECDM), when a spiral electrode was used, the axial updating speed of electrolyte was accelerated, and the uniformity of the slit width in the depth direction was enhanced.…”

Section: Methodsmentioning

confidence: 99%

Experimental Study of Tool Wear in Electrochemical Discharge Machining

Bian

Liu

et al. 2020

Applied Sciences

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Electrochemical discharge machining (ECDM) is an emerging special processing technology for non-conductive hard and brittle materials, but it may encounter the problem of tool wear due to its process characteristics, which affects the processing accuracy. In this study, in the non-machining state, the tungsten carbide spiral cathode with a diameter of 400 μm was selected to analyze the influencing mechanism of the process parameters on tool wear, and a suitable voltage range for the processing was obtained. The influence of the cathode’s loss behavior on the film formation time and the average current of spark discharge was discussed based on the current signal. The results show that the tool wear mainly appears from the bottom to the end and edge tip of the protrusion. Loss is mainly in the form of local material melting or gasification at high temperature. In addition, the loss may shorten the film formation time, but the effect on the average current of spark discharge is small.

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Section: Methodsmentioning

confidence: 99%

Experimental Study of Tool Wear in Electrochemical Discharge Machining

Bian

Liu

et al. 2020

Applied Sciences

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“…Although quartz is a kind of glass, it has different characteristics. The effects of electrolyte and pulse properties on ECDM characteristics of quartz were investigated by Nguyen et al [22].…”

Section: Ecdmmentioning

confidence: 99%

Electrochemical discharge machining: A review

Özmen¹,

Asiltürk²

2016

IJSEA

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In this study, progress and sort of electrochemical discharge machining (ECDM) that was developed to manufacture the micro features like micro grooves, micro pillar, micro holes and micro channels etc. were investigated. Many materials can be machined regardless of material conductivity, hardness and strength by ECDM using electro chemical machining (ECM) and electric discharge machining (EDM) combination. Researchers developed electrochemical discharge drilling (ECDD), turning (ECDT), grinding (ECDG), milling, dressing, trepanning, wire ECDM, die-sinking ECDM, rotary ECDM, powder mixed ECDM, magnetic field assisted ECDM, vibration assisted ECDM methods. Pyrex, glass, stainless steel, cermet, soda lime glass, quartz, silicon nitride, zirconium oxide, borosilicate glass, diamond crystals, e-glass/epoxy composite, kevlar/epoxy composite and silicon wafer were used as a work piece. Effects of machining voltage and drilling depth on mean diameter, influence of tool travel rate on groove width and depth and effects of voltage types on micro holes accuracy and machining type etc were investigated. This review is to discuss the results of studies and applicability of this methods. It sums up also with a vision for future research in electrochemical micromachining.

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“…The experimental results showed that the thermal damage diminishes with the rise of pulse frequency and the decrease of duty factor. Nguyen et al [ 8 ] studied the microstructure of ECDM ceramics and discussed the influences of electrolyte level and concentration, pulse voltage, pulse opening and closing time, and tool feed rate on the machining performance. Hajian [ 9 ] studied the effects of magnetic field direction and electrolyte concentration on the microstructure of glass in ECDM, and the effects of machining voltage, field orientation, and electrolyte concentration on the machining performance.…”

Section: Introductionmentioning

confidence: 99%

Experimental Study on Ultrasonic Vibration-Assisted WECDM of Glass Microstructures with a High Aspect Ratio

Chen

Xin

2021

Micromachines

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With the rapid development of micro-electro-mechanical systems (MEMSs), the demand for glass microstructure is increasing. For the purpose of achieving high quality and stable machining of glass microstructures with a high aspect ratio, ultrasonic vibration is applied into the micro-wire electrochemical discharge machining (WECDM), which is proposed as ultrasonic vibration-assisted WECDM with a micro helical electrode. Firstly, the formation of a gas film on the surface of the helical electrode in WECDM machining is simulated, meaning the thickness of the gas film can be reduced by adding suitable ultrasonic amplitude, thus reducing the critical voltage, then the machining localization and stability were enhanced. Then, the micro helical electrode with a diameter of 100 μm is used to carry out sets of experiments that study the influence of ultrasonic amplitude, machining voltage, duty factor, pulse frequency, and feed rate on the slit width. The experimental results show that the machining stability and quality are significantly improved by adding suitable ultrasonic amplitude. When the amplitude was 5.25 μm, the average slit width was reduced to 128.63 μm with a decrease of 20.78%. Finally, with the optimized machining parameters, micro planar coil structure and microcantilever structure with a high aspect ratio were fabricated successfully on the glass plate. It is proved that ultrasonic vibration-assisted WECDM with the micro helical electrode method can meet the requirements of high aspect ratio microstructure machining for hard and brittle materials.

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Experimental investigation of ECDM for fabricating micro structures of quartz

Cited by 75 publications

References 14 publications

Experimental Study of Tool Wear in Electrochemical Discharge Machining

Experimental Study of Tool Wear in Electrochemical Discharge Machining

Electrochemical discharge machining: A review

Experimental Study on Ultrasonic Vibration-Assisted WECDM of Glass Microstructures with a High Aspect Ratio

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