2019
DOI: 10.1088/1361-6595/ab4c59
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Experimental investigation of electron heating modes in capacitively coupled radio-frequency oxygen discharge

Abstract: A Langmuir probe has been used to investigate electron heating mechanisms in a capacitively coupled oxygen discharge over a wide pressure range (50-800 mTorr) at a fixed applied power (200 W). Evidence presented here from experimentally obtained electron energy distribution functions (EEDFs) illustrates discharge transition from a collisionless (stochastic) to a collisional (Ohmic) dominant regime with increasing oxygen pressure. The discharge exhibited a bi-Maxwellian EEDF in the collisionless regime, dominat… Show more

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Cited by 7 publications
(11 citation statements)
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“…The RES loop antenna is placed at a viewport located at a position halfway between the electrodes and is therefore in situ relative to the bulk plasma region. The active current (i.e., I.cosΦ 13,14 ) measured using a V-I probe (further discussion on this below) is found to strongly correlate to the IRES signal at the fundamental frequency (i.e., 13.56 MHz) corroborating that RES is a monitor of the conduction current at this emission line. The conduction current in the bulk is responsible for ohmic heating, the key avenue for power dissipation via electrons which is typically expressed in terms of the electron density ( ) and electron drift velocity ( ) as…”
Section: Real-time Monitoring Of Power Variations In the Process Chamber Using Resmentioning
confidence: 63%
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“…The RES loop antenna is placed at a viewport located at a position halfway between the electrodes and is therefore in situ relative to the bulk plasma region. The active current (i.e., I.cosΦ 13,14 ) measured using a V-I probe (further discussion on this below) is found to strongly correlate to the IRES signal at the fundamental frequency (i.e., 13.56 MHz) corroborating that RES is a monitor of the conduction current at this emission line. The conduction current in the bulk is responsible for ohmic heating, the key avenue for power dissipation via electrons which is typically expressed in terms of the electron density ( ) and electron drift velocity ( ) as…”
Section: Real-time Monitoring Of Power Variations In the Process Chamber Using Resmentioning
confidence: 63%
“…The value of ne at 200 W ranging from ~2.75 × 10 15 m -3 at 10 mTorr to ~2.5 × 10 16 m -3 at 200 mTorr pressure with corresponding electron plasma frequencies (ωp) 13,16 ranging from 0.47 to 1.74 GHz. The electron temperature (Te) values (at 100 mTorr) ranged from 4.5 eV at 10 mTorr to 0.8 eV at 200 mTorr.…”
Section: Real-time Monitoring Of Pressure Variations In the Process Chamber Using Resmentioning
confidence: 99%
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“…Capacitively coupled oxygen plasma have been shown to operate in two distinctive modes: α mode and γ mode [21][22][23]. At low RF powers the plasma operates in α mode.…”
Section: Doe Methodsmentioning
confidence: 99%