Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators

Abstract

Nonlinear phenomenon is presently attracting considerable attention in the field of microelectromechanical systems (MEMS). By adjusting a controllable tuning voltage, the nonlinearity of microdevices, especially on microactuators, can be precisely manipulated. To trap and separate small particles, generating a large and stable rotation force is critical in micromanipulations. Here, we report a simple and potential angular momentum cell comprising a piezoelectric MEMS-based nonlinear multi-mode resonator with integrated electrodes. A nonlinear rotating nodal line has been observed in specific frequency bands by applying a controllable low voltage of sub 5 V on a 4-port resonator made of lead zirconate titanate (PZT) thin films. The magnitude of the actuated voltage is Complementary-Metal-Oxide-Semiconductor (CMOS)-compatible and easy to integrate with the circuit. Furthermore, the real-time rotation motion of the MEMS-based nonlinear multi-mode resonator is also verified by a laser doppler vibrometer (LDV) at both chirp and single input frequencies, respectively. Therefore, this angular momentum cell shows great potential in the application of micromanipulation.