Combustion of hydrocarbons with pure oxygen as oxidizer is used, e.g., in hightemperature processes such as the partial oxidation (POX) of hydrocarbons to produce synthesis gas of high purity. Due to the prevailing temperatures, active cooling is required for many parts. For laboratory-scale experiments, the dimensions of key parts are too small for conventional manufacturing processes. One example is the manufacturing of a burner plate especially developed for POX processes. The complex geometries of several hundreds of burner nozzles and perpendicular cooling channels across the diameter of the burner plate cannot be manufactured in a conventional way. For this burner, the advantage of chemical etching of thin sheet material and stacking of multiple sheet layouts was used to assemble the layout of the burner. The burner plate was then diffusion-bonded, allowing the complex design to be realized. The partial oxidation of CH 4 /O 2 flames at the laboratory scale could thus be studied under industrially relevant conditions.