Experimental investigation of the tip based micro/nano machining

Abstract

Based on the self-developed three dimensional micro/nano machining system, the effects of machining parameters and sample material on micro/nano machining are investigated. The micro/nano machining system is mainly composed of the probe system and micro/nano positioning stage. The former is applied to control the normal load and the latter is utilized to realize high precision motion in the xy plane. A sample examination method is firstly introduced to estimate whether the sample is placed horizontally. The machining parameters include scratching direction, speed, cycles, normal load and feed. According to the experimental results, the scratching depth is significantly affected by the normal load in all four defined scratching directions but is rarely influenced by the scratching speed. The increase of scratching cycle number can increase the scratching depth as well as smooth the groove wall. In addition, the scratching tests of silicon and copper attest that the harder material is easier to be removed. In the scratching with different feed amount, the machining results indicate that the machined depth increases as the feed reduces. Further, a cubic polynomial is used to fit the experimental results to predict the scratching depth. With the selected machining parameters of scratching direction d3/d4, scratching speed 5μm/s and feed 0.06μm, some more micro structures including stair, sinusoidal groove, Chinese character "田", "TJU" and Chinese panda have been fabricated on the silicon substrate.

Improving the Consistency of Nanoscale Etching for Atomic Force Microscopy Tomography Applications

“…5 µm × 5 µm scans used 512 scan lines, for a feed of 9.8 nm. Note that we did not investigate the effect of feed as it has been studied previously (Fang et al, 2006;Guo et al, 2017;Celano et al, 2018). Our feeds were chosen for a favorable compromise between spatial resolution, material removal rate (removing sufficient material to profile through the sample in a reasonable time) and trench smoothness.…”

Experimental and Numerical Investigation on the Effect of Scratch Direction on Material Removal and Friction Characteristic in BK7 Scratching

“…Researches have revealed that nanoscratching of hard-brittle materials is a complex process with multiple influencing factors, including scratch speed [6][7][8], shape and geometric parameters of tool [9,10], environment [11], and so on. In addition, many scholars have conducted studies to explore the effect of scratch directions in the processing of materials [12][13][14][15][16]. Yan investigated the material removal state under different scratch directions employing AFM on single crystal copper, it is found that the height of pile-up is greatly influenced by scratch directions [17].…”

A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier

“…ICRO/NANO positioning system has broad applications in biological manipulation, optical fiber alignment, nano-imprint lithography, scanning probe microscopes, micro/nano assembly and etc [1][2][3][4][5][6]. Compared to conventional macro positioning system, compliant micro/nano positioning system can realize nanometric resolution through the elastic deformation of flexure hinges, which has the advantages of no friction [7][8][9][10][11], no backlash, no lubrication and easy fabrication, whereas the travel range is usually limited from a few microns to several millimeters. In many application fields like probe tip-based micro/nano scratching, there have been quite a few demands of large stroke positioning [12][13][14], and many efforts have been devoted to realizing high precision and large workspace simultaneously.…”