Experimental procedure to design stressed HBAR devices when the third-order elastic constants are not known

Abstract

Vibration sensitivity is an important specification for oscillators dedicated to space or airborne systems. For some crystallographic material, some physical constant are not yet measured. So, computation of stress coefficients of frequency is not possible. This paper presents a simple experimentation which allows the determination of the six stress coefficients of frequency for each high-overtone bulk acoustic resonators configuration. The first three coefficient are s αmn are -2.9×10 -12 /Pa, 4.3×10 -10 /Pa and 9.4×10 -11 /Pa. The relative standard deviation can be high due to experimental uncertainty.