It is important to reduce substrate noise in the analog/digital mixed‐signal integrated circuits. In order to understand the influence of substrate noise, a technique to measure substrate noise using a chopper‐type voltage comparator based on an equivalent sampling method is proposed. The substrate noise waveform was measured and the transmission path and characteristics of substrate noise were analyzed. By adjusting the pulse width of the digital noise source, the waveform of substrate noise detected at the transition from auto‐zero to the compare mode and at the transition from compare to auto‐zero mode of the voltage comparator were evaluated. As a result of analyzing the transmission path, it was found that the substrate noise detected during the compare mode was transmitted through multiple paths, including switches, and that its bandwidth was limited by the bandwidth of the inverter amplifier. The substrate noise detected during the auto‐zero mode was detected mainly by the substrate biasing effect (body effect) of the inverter amplifier and had a large bandwidth due to negative feedback during auto‐zeroing. Therefore, for noise measurement, it is most effective to detect the substrate noise at the transition from the auto‐zero to compare mode. In this proposal, a modified voltage comparator was configured to selectively measure the substrate noise. The simulated characteristic indicates that the substrate noise could be selectively measured at the transition from the auto‐zero to the compare mode if a capacitive load was added to the output of the inverter amplifier during the compare mode. © 1998 Scripta Technica, Electron Comm Jpn Pt 2, 81(5): 59–66, 1998