Experimental setup for precise measurement of thin film thickness

Abstract

The paper describes an experimental setup designed to measure the thickness of metal and organic foils with an accuracy close to 3 µm. The working principle of the setup is based on the interaction between X-ray radiation and matter, specifically the reduction in X-ray intensity as it passes through a material layer. The setup allows for the control of the energy of the incident X-ray radiation within the range of 5 to 30 keV. Additionally, it can detect inhomogeneities in the foil by analysing the recorded spectrum of the X-ray radiation that has passed through the foil. For organic foils such as carbon fiber or mylar, the setup operates in the soft X-ray range up to 10 keV, utilising energy dispersive analysis of the X-ray signal that is transmitted through and scattered by the object under study.