Experimental studies of a KrF and ArF discharge laser

Sze, Robert C.; Loree, Thomas R.

doi:10.1109/jqe.1978.1069724

Cited by 54 publications

(10 citation statements)

References 9 publications

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“…This result is consistent with the main atomic and molecular excited species lifetimes [14,15] and with the lifetime of the ionized species (Xe+, Xe^, Cl_ ). In fací the ionic density, following after the discharge the two body recombination law n(t) = n( 0)/(l + kn(0)t), with a rate constant k ~ 10" 6 cm3 s_1 [14], decays within 1 ms to a valué of 109 ions cm" 3, which is quite lower than the estimate preionization density [16].…”

Section: Double Pulse Experimentsmentioning

confidence: 84%

High repetition rate effects in XeCl tea lasers

Buffa¹,

Burlamacchi²,

Matera³

et al. 1982

Optics Communications

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The high repetition rate capability of a discharge pumped XeCl láser with static fill has been studied by double pulse experiments. By suitably selecting the láser parameters (energy deposition, gas mixture composition, filling pressure), following an analytical model of the discharge induced thermal effects, láser action from the second pulse for delays as short as 5 ms with an energy of 12.5 mJ has been achieved.

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Section: Double Pulse Experimentsmentioning

confidence: 84%

High repetition rate effects in XeCl tea lasers

Buffa¹,

Burlamacchi²,

Matera³

et al. 1982

Optics Communications

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“…Sufficient preionization electron density, typically 10 8 -10 10 cm À3 , prevents the rapid formation of streamers and delays their subsequent transition to arcs. [10][11][12][13] The density and uniformity of the photoelectrons and timing of the preionization directly affect the laser's performance. 12 There are at least two preionization schemes.…”

Section: Introductionmentioning

confidence: 99%

Photo-triggering and secondary electron produced ionization in electric discharge ArF* excimer lasers

Xiong

Kushner

2011

Journal of Applied Physics

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Electric discharge excimer lasers are sustained in multi-atmosphere attaching gas mixtures that are typically preionized to enable a reproducible, uniform glow, which maximizes optical quality and gain. This preionization is often accomplished using UV light produced by a corona discharge within the plasma cavity. To quantify the relationship between corona discharge properties and those of the laser discharge, the triggering of electron avalanche by preionizing UV light in an electric dischargepumped ArF* excimer laser was numerically investigated using a two-dimensional model. The preionizing UV fluxes were generated by a corona-bar discharge driven by the same voltage pulse as the main discharge sustained in a multi-atmospheric Ne/Ar/Xe/F 2 gas mixture. The resulting peak photoelectron density in the inter-electrode spacing is around 10 8 cm À3 , and its distribution is biased toward the UV source. The preionization density increases with increasing dielectric constant and capacitance of the corona bar. The symmetry and uniformity of the discharge are, however, improved significantly once the main avalanche develops. In addition to bulk electron impact ionization, the ionization generated by sheath accelerated secondary electrons was found to be important in sustaining the discharge current at experimentally observed values. At peak current, the magnitude of the ionization by sheath accelerated electrons is comparable to that from bulk electron impact in the vicinity of the cathode.

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“…1,2) On the other hand, gas lasers in the UV and VUV regions are pumped by the electron beam and the discharge. [6][7][8][9][10][11][12][13] Discharge excitation systems are more suitable for a highrepetition operation than electron beam excitation systems. The discharge excitation system is practical because the device is small compared with the electron beam excitation system.…”

mentioning

confidence: 99%

Longitudinally Excited N₂ Laser Pumped by Lamplike Discharge

Uno

Nakamura

Goto

et al. 2006

jjap

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Nitrogen laser oscillation is observed in a lamplike discharge within a longitudinal excitation tube. The laser consists of a 30-cm-long Pyrex glass tube with an inner diameter of 2.5 mm and a step-up transformer directly coupled to the discharge tube without a high-voltage switch. The excitation is produced by wall-coupled discharge. The laser output energy is 1.7 µJ at 12 Torr (1.6 kPa) and 40 Hz when applying a slow-rising voltage pulse of 37 kV (rise time of 572 ns).

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Experimental studies of a KrF and ArF discharge laser

Cited by 54 publications

References 9 publications

High repetition rate effects in XeCl tea lasers

High repetition rate effects in XeCl tea lasers

Photo-triggering and secondary electron produced ionization in electric discharge ArF* excimer lasers

Longitudinally Excited N₂ Laser Pumped by Lamplike Discharge

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Experimental studies of a KrF and ArF discharge laser

Cited by 54 publications

References 9 publications

High repetition rate effects in XeCl tea lasers

High repetition rate effects in XeCl tea lasers

Photo-triggering and secondary electron produced ionization in electric discharge ArF* excimer lasers

Longitudinally Excited N2 Laser Pumped by Lamplike Discharge

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Longitudinally Excited N₂ Laser Pumped by Lamplike Discharge