Experimental studies of complex crater formation under cluster implantation of solids

Prasalovich, S.; Popok, Vladimír; Persson, Per; Campbell, Eleanor E. B.

doi:10.1140/epjd/e2005-00197-2

Cited by 20 publications

(25 citation statements)

References 41 publications

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“…Therefore, after a certain energy threshold, the crater formation rate starts decreasing [294] and crater diameters can become smaller. The latter tendency was, for example, found for the implantation of small Ar n + into silicon: the craters shrank at higher impact energies [286].…”

Section: Crater and Hillock Formationmentioning

confidence: 73%

“…The efficiency of crater formation is also dependent on the properties of the substrate material. Higher material density, melting point and larger atomic displacement energies provide less favorable conditions for crater formation as shown by comparison of keV-energy argon cluster impact on silicon and sapphire [286]. Recent experiments on Ar n + implantation into diamond have supported this conclusion [287].…”

Section: Crater and Hillock Formationmentioning

confidence: 98%

“…Sometimes, dimples were found at the top of the hillocks [275]. Typically, the height varies on the scale of a few nm and the basal diameter is between 10-50 nm [275,286,310].…”

Section: Crater and Hillock Formationmentioning

confidence: 99%

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Cluster–surface interaction: From soft landing to implantation

Popok

Barke

Campbell

et al. 2011

Surface Science Reports

245

197

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The current paper presents a state-of-the-art review in the field of interaction of atomic and molecular clusters with solids. We do not attempt to overview the entire broad field, but rather concentrate on the impact phenomena: how the physics of the cluster-surface interaction depends on the kinetic energy and what effects are induced under different energetic regimes. The review starts with an introduction to the field and a short history of cluster beam development. Then fundamental physical aspects of cluster formation and the most common methods for the production of cluster beams are overviewed. For cluster-surface interactions, one of the important scenarios is the low-energy regime where the kinetic energy per atom of the accelerated cluster stays well below the binding (cohesive) energy of the cluster constituents. This case is often called This is the peer-reviewed author's version of a work that was accepted for publication in Surface Science Reports. Changes resulting from the publishing process, such as editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version

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Section: Crater and Hillock Formationmentioning

confidence: 73%

Section: Crater and Hillock Formationmentioning

confidence: 98%

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Cluster–surface interaction: From soft landing to implantation

Popok

Barke

Campbell

et al. 2011

Surface Science Reports

245

197

View full text Add to dashboard Cite

show abstract

“…2,9,10 The primary collision between the cluster and the target atoms affects very much both the dynamics of the cluster and the subsequent relaxation phenomena in the target. [11][12][13] The absence of a commonly accepted theory of cluster stopping in matter complicates the use of cluster beams: different simulations and experiments show rather different dependences of the projected ranges R p of cluster constituents and the radiation damage for various cluster species, sizes, and energies as well as for different target materials. 2 However, a recent study of metal cluster implantation in graphite indicated a very similar implantation behavior for different metal species.…”

Section: Take Down Policymentioning

confidence: 99%

Stopping of energetic argon cluster ions in graphite: Role of cluster momentum and charge

et al. 2010

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We show that the implantation depth for argon clusters in graphite scales linearly with cluster momentum. A plot of implantation depth versus the momentum scaled with the projected surface area of the cluster falls on the same universal plot as that shown for semiconductor and metallic clusters, thus providing a universal scaling law for cluster implantation. Molecular dynamics simulations provide some insight to the mechanisms behind the empirical observation.

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“…3,8 Collisions of many cluster atoms at a relatively small surface area lead to a high density of energy locally transferred to the target, which causes nonlinear effects, leading to strong radiation damage. 3,9 The primary collision stage affects very much the penetration dynamics of the clusters: cluster constituents have longer ranges compared to monomers at the same impact energy per atom. 10,11 Unfortunately, different simulations and experiments showed rather different dependences of the projected ranges R p of cluster constituents and radiation damage developed by them for various cluster species, sizes, and energies as well as for different target materials.…”

mentioning

confidence: 99%