Experimental Study of Highly Sensitive Sensor Using a Surface Acoustic Wave Resonator for Wireless Strain Detection

Hara, Bao; Mitsui, Misato; Sano, Koji; Nagasawa, Sumito; Kuwano, Hiroki

doi:10.7567/jjap.51.07gc23

Cited by 7 publications

(5 citation statements)

References 23 publications

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“…1.b). The combination of the above two influence factors enables the variation of resonant frequency of the SAW resonator, which can be expressed by the following differential equation [18]:…”

Section: Design and Experimentsmentioning

confidence: 99%

3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Wan

et al. 2021

Measurement Science Review

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This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.

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Section: Design and Experimentsmentioning

confidence: 99%

3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Wan

et al. 2021

Measurement Science Review

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“…Filters=duplexers [208][209][210][211][212][213][214][215][216][217][218] Resonators [219][220][221][222][223] SAW sensors 20,209,[211][212][213]216,217,219, Ultrasonic transducers [262][263][264][265][266][267][268][269][270][271] Functional modules [272][273][274][275] Piezoelectric transformers 276) Nonlinear devices 260,277,278) Acoustic sensors (physical, chemical, bio, etc. )…”

Section: Transmittermentioning

confidence: 99%

“…By employing this feature, SAW devices are used as sensors, which are called SAW sensors. 20,209,[211][212][213]216,217,219, Since piezoelectric devices are essentially electromechanical transducers, they are very often used as ultrasonic transducers [262][263][264][265][266][267][268][269][270][271] and in functional modules [272][273][274][275] as sensors and actuators. Piezoelectric transducers generally have reversibility in their operation.…”

Section: Theorymentioning

confidence: 99%

Introduction of measurement techniques in ultrasonic electronics: Basic principles and recent trends

Mizutani¹,

Wakatsuki²,

Ebihara³

2016

Jpn. J. Appl. Phys.

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Measurementthe act of measuring physical properties that we performhas the potential to contribute to the successful advancement of sciences and society. To open doors in physics and other sciences, various measurement methods and related applications have been developed, and ultrasound has remained a useful probe, power source, and interesting measurement object for the past two centuries. In this paper, we first summarize the basic principles of ultrasound from the viewpoint of measurement techniques for readers who just have started studying or are interested in the field of ultrasonic electronics. Moreover, we also introduce recent studiesultrasonic properties of materials, measurement techniques, piezoelectric devices, nonlinear acoustics, biomedical ultrasound, and ocean acousticsand their trends related to measurement techniques in ultrasonic electronics to provide some ideas for related applications.

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“…IDT sensors are also used as strain gauge sensors and guided wave sensors for evaluation of health and quantification of damage in the critical infrastructure. Stoney et al, 2014 [ 56 ], Humphries et al, (2015) [ 57 ], and Hara et al, (2012) [ 58 ] have all developed highly sensitive strain sensors using an SAW resonator for detection of damage in metallic structures of aircraft carriers [ 59 ]. The IDT technique has been used to generate Lamb waves in polyvinylidene fluoride piezoelectric polymer films (PVDFs) used for characterization of biological cells, polymers and soft flexible electronics due to its low impedance.…”

Section: Introductionmentioning

confidence: 99%

Single-Input and Multiple-Output Surface Acoustic Wave Sensing for Damage Quantification in Piezoelectric Sensors

Pamwani

Habib

Melandsø

et al. 2018

Sensors

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The main aim of the paper is damage detection at the microscale in the anisotropic piezoelectric sensors using surface acoustic waves (SAWs). A novel technique based on the single input and multiple output of Rayleigh waves is proposed to detect the microscale cracks/flaws in the sensor. A convex-shaped interdigital transducer is fabricated for excitation of divergent SAWs in the sensor. An angularly shaped interdigital transducer (IDT) is fabricated at 0 degrees and ±20 degrees for sensing the convex shape evolution of SAWs. A precalibrated damage was introduced in the piezoelectric sensor material using a micro-indenter in the direction perpendicular to the pointing direction of the SAW. Damage detection algorithms based on empirical mode decomposition (EMD) and principal component analysis (PCA) are implemented to quantify the evolution of damage in piezoelectric sensor material. The evolution of the damage was quantified using a proposed condition indicator (CI) based on normalized Euclidean norm of the change in principal angles, corresponding to pristine and damaged states. The CI indicator provides a robust and accurate metric for detection and quantification of damage.

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Experimental Study of Highly Sensitive Sensor Using a Surface Acoustic Wave Resonator for Wireless Strain Detection

Cited by 7 publications

References 23 publications

3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Introduction of measurement techniques in ultrasonic electronics: Basic principles and recent trends

Single-Input and Multiple-Output Surface Acoustic Wave Sensing for Damage Quantification in Piezoelectric Sensors

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