Experimental Study of Highly Sensitive Sensor Using a Surface Acoustic Wave Resonator for Wireless Strain Detection

Bao, Zhenan; Hara, Motoaki; Mitsui, Misato; Sano, Koji; Nagasawa, Sumito; Kuwano, Hiroki

doi:10.1143/jjap.51.07gc23

Cited by 14 publications

(5 citation statements)

References 34 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Bao Zhongqing showed that a SAW strain sensor was fabricated using LiNbO 3 and a quartz substrate, and applied in a tensile test by attaching the steel specimen based on Japanese Industrial Standards (JIS Z2441-1). The results confirmed that the developed sensor could detect a strain of 10 −6 order with linearity [16]. Wen Wang has performed wireless measurements of SAW strain sensors using Y-cut 35 • X quartz as a piezoelectric substrate [17].…”

Section: Introductionsupporting

confidence: 62%

Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors

Liu,

Yang,

et al. 2024

J. Micromech. Microeng.

View full text Add to dashboard Cite

Accurate measurement of physical parameters based on sensing technology is an important basis for equipment structural health monitoring technology. In harsh environments, strain measurement techniques based on SAW sensors have attracted much attention. The bonding adhesive is a key step in the strain measurement process, and its effect on the accuracy of the measurement results cannot be ignored. In this paper, the one-port resonant SAW strain sensor is prepared using LiNbO3 as a piezoelectric substrate, Pt as an electrode and SiO2 as a protective layer. The strain characteristics and temperature characteristics of SAW strain sensors at the thickness of the bonding adhesive (Model: DOUBLE-BOND CHEMICAL®DB5016) are explored. The frequency-temperature curves of the SAW sensors show a quasi-linear decreasing trend with increasing temperature, and the temperature-frequency characteristics are similar for different bonding adhesive thicknesses. The strain sensitivity increases and then decreases with increasing temperature, and reaches a maximum at 150℃. An increase in the thickness of the bonding adhesive leads to a decrease in the temperature linearity and an increase in the temperature sensitivity of the SAW strain sensor, which is maximized at a bonding adhesive thickness of 0.35mm. The increase in the thickness of the bonding adhesive leads to a decrease in the strain linearity and strain sensitivity of the SAW sensor. The relationship between the strain transfer efficiency of the SAW sensor and the thickness of the bonding layer, the shear modulus of the bonding layer, the length of the sensor, the thickness of the sensor substrate and the shear modulus of the sensor is established through theoretical derivation. A theoretical foundation is provided for the accurate measurement of strain based on SAW technology.

show abstract

Section: Introductionsupporting

confidence: 62%

Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors

Liu,

Yang,

et al. 2024

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…The sensitivity of the devices is calculated to be Z $ 34.7 Hz m3 À1 . Although the sensitivity is not as good as those of the SAW devices made on other piezoelectric substrates, the detectable strain range is at least 5 times larger than those that have the rigidity and fragility limitation, 12,[24][25][26][27] clearly demonstrating their great potential for application in wide range strain sensing. Furthermore the sensitivity can be improved by using a thicker ZnO thin lm layer for SAW devices as demonstrated by Nalamwar et al 31 and our work on other SAW sensors and actuators.…”

Section: Strain Sensormentioning

confidence: 99%

Bendable transparent ZnO thin film surface acoustic wave strain sensors on ultra-thin flexible glass substrates

Chen

Wang

et al. 2014

J. Mater. Chem. C

View full text Add to dashboard Cite

Flexible and transparent (FT) ZnO thin film based surface acoustic wave (SAW) devices using indium tin oxide (ITO) electrodes were fabricated on ultrathin flexible glass substrates. The influence of annealing process and ITO thickness on the optical properties and acoustic wave power transmission properties of the devices were investigated. The performance of the devices improved significantly when the annealing 10 temperature was raised up to 300 °C. The flexible glass based SAW devices exhibited similar power transmission performance, but have better optical transmittance than those on rigid glass. These FT strain sensors worked well under various applied strains up to ±3000 µε with fast response time, and showed excellent linearity of resonant frequency with the change of strain with a sensitivity of ~34 Hz/με. The strain sensors demonstrated excellent stability and reliability under cyclic bending. The results 15 demonstrated great potential of applications of the FT-SAW device based strain sensors on flexible glass substrates. 65 Willow Glass with a thickness of 100 μm and rigid glass (Corning 2318, 500 μm) were used as the substrates for the device fabrication. The diameter of both the flexible glass and rigid glass wafers was 100 mm. Nanocrystalline ZnO thin films with (0002) crystal orientation were deposited on the substrates by sputtering. 70 Rigid glass was also used to fabricate the SAW devices for comparison. The deposition conditions for the ZnO films were fully optimized through our previous work, 16,17 and were used directly except the deposition temperature which was 100 °C for this work. It was found the crystal structure and optical properties 75 1 S.

show abstract

“…Another frequently used strain sensing technology is the surface acoustic wave (SAW) [ 8 , 9 , 10 ]. SAW-based sensors monitor strain by detecting the change in acoustic wave velocity due to deformation.…”

Section: Introductionmentioning

confidence: 99%

A Wireless Passive Sensing System for Displacement/Strain Measurement in Reinforced Concrete Members

Ozbey

Ertürk

Demir

et al. 2016

Sensors

View full text Add to dashboard Cite

In this study, we show a wireless passive sensing system embedded in a reinforced concrete member successfully being employed for the measurement of relative displacement and strain in a simply supported beam experiment. The system utilizes electromagnetic coupling between the transceiver antenna located outside the beam, and the sensing probes placed on the reinforcing bar (rebar) surface inside the beam. The probes were designed in the form of a nested split-ring resonator, a metamaterial-based structure chosen for its compact size and high sensitivity/resolution, which is at µm/microstrains level. Experiments were performed in both the elastic and plastic deformation cases of steel rebars, and the sensing system was demonstrated to acquire telemetric data in both cases. The wireless measurement results from multiple probes are compared with the data obtained from the strain gages, and an excellent agreement is observed. A discrete time measurement where the system records data at different force levels is also shown. Practical issues regarding the placement of the sensors and accurate recording of data are discussed. The proposed sensing technology is demonstrated to be a good candidate for wireless structural health monitoring (SHM) of reinforced concrete members by its high sensitivity and wide dynamic range.

show abstract

Experimental Study of Highly Sensitive Sensor Using a Surface Acoustic Wave Resonator for Wireless Strain Detection

Cited by 14 publications

References 34 publications

Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors

Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors

Bendable transparent ZnO thin film surface acoustic wave strain sensors on ultra-thin flexible glass substrates

A Wireless Passive Sensing System for Displacement/Strain Measurement in Reinforced Concrete Members

Contact Info

Product

Resources

About