Experimental study of the sensitivity of a porous silicon ring resonator sensor using continuous in-flow measurements

Caroselli, Raffaele; Ponce-Alcántara, Salvador; Quilez, Francisco Prats; Martín-Sánchez, David; Torrijos‐Morán, Luis; Barres, Amadeu Griol; Bellières, Laurent; Bandarenka, Hanna; Girel, Kseniya; Bondarenko, Vitaly; García-Rupérez, Jaime

doi:10.1364/oe.25.031651

Cited by 27 publications

(24 citation statements)

References 22 publications

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“…Beyond photolithography, patterning of microscale features in PS has been demonstrated with various approaches including imprinting, e‐beam lithography, and laser writing . Creating features via laser writing in PS is particularly useful as the localized high temperatures can simultaneously create microscale features and passivate the films through oxidation.…”

Section: A Comparison Of Laser Writing Approaches Involving Porous Mamentioning

confidence: 99%

Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Keating

Sun

2018

Adv Materials Technologies

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The selective formation of either oxidized or carbonized features into 2.5 µm thick porous silicon (PS) films using laser writing at a wavelength of 405 nm is demonstrated. Oxidized features are formed in air while carbonized features are achieved during the flow of propane at 600 sccm. Voids which have been previously associated with the use of propane are not observed, largely due to the rapid heating and high flow rates achieved in the experiment. Carbonized regions with feature widths down to 1.8 µm are achieved and chemical resistance to both hydrofluoric acid and potassium hydroxide is demonstrated. Once carbonized regions are formed, the surrounding areas can be overwritten in air to convert the surrounding regions into oxidized PS allowing films to be created with as‐fabricated, oxidized and carbonized regions. Energy dispersive X‐ray and Raman analysis confirms the presence of carbon within the written structures. At high optical powers, cracking around the carbonized features is observed which is attributed to a contraction of the film. Such cracking is not observed during selective oxidation of features. This work significantly enhances the ability to engineer and pattern the composition of PS films enabling selective control of the material's properties and functionality.

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Section: A Comparison Of Laser Writing Approaches Involving Porous Mamentioning

confidence: 99%

Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Keating

Sun

2018

Adv Materials Technologies

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“…The miniature silicon piezoresistive pressure sensor adopts the advanced miniaturization manufacturing process to integrate the silicon diaphragm as the sensitive element. The four resistors on the diaphragm are connected through the screen-printing circuit, and the delicate micro-packaging is carried out with the metal shell [ 26 , 27 ]. A schematic diagram of the sensor packaging structure is shown in Figure 3 , and the picture of the sensor is shown in Figure 4 .…”

Section: Development Of Miniature Silicon Piezoresistive Sensormentioning

confidence: 99%

Application of Miniature FBG-MEMS Pressure Sensor in Penetration Process of Jacked Pile

2020

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In order to study the penetration mechanism of jacked piles in viscous soil foundation, the stress variation law of the pile–soil interface was obtained by installing silicon piezoresistive earth pressure and pore water pressure sensors, and fiber Bragg grating (FBG) sensors in a model pile body, and the penetration characteristics of jacked piles in homogeneous viscous soil were defined. The test results show that: Fiber Bragg grating and silicon piezoresistive sensing technology can better meet the requirements of testing the characteristics of jacked pile in viscous soil. The ratio of pile lateral resistance to pile end resistance varies when pile is jacked in homogeneous viscous soil. In the early stage of pile jacking, the ratio of pile lateral resistance is small, and in the later stage of pile jacking, the ratio of pile lateral resistance increases, but the ratio of pile end resistance is still higher than that of pile lateral resistance. The ratio of the effective stress to the total radial stress is high, and the variation law of the two is consistent with the depth. The total radial stress, pore water pressure, and effective radial stress all exhibit the degradation phenomenon, and the degradation degree decreases gradually with the increase in penetration depth at the same depth. The ratio of excess pore water pressure to overburden weight decreases with the increase in depth, and the maximum value is 87%. The research results can provide a reference for the engineering practice of jacked pile in viscous soil foundation.

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“…Combining a MR structure and a porous material such as PS, is of great interest to enhance sensor characteristics as the interaction between the molecules to be detected and the optical wave is optimized as it occurs in the core of the porous waveguide instead of in the evanescent part for MR based on bulk materials [16]. Very promising values of sensitivities have already been obtained with one MR based on PS for salt solution [17], glucose detection [18] or with different ethanol-water dilutions [19]. Moreover very promising low limit of detection has been calculated especially by cascading a PS MR with a reference MR based on polymers [20].…”

Section: Introductionmentioning

confidence: 99%

Submicron gap reduction of micro-resonator based on porous silica ridge waveguides manufactured by standard photolithographic process

et al. 2019

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In this paper, we demonstrate a new method to obtain a low gap between the access waveguide and the racetrack cavity of a micro-resonator based on porous silica material and using standard photolithographic process. The photolithographic process is first carried out on porous silicon layers to obtain porous silicon ridge waveguides that constitutes the racetrack micro-resonator. Then the full oxidation of the micro-resonator is performed. Because of the volume expansion of silicon that occurs during its full oxidation, the gap is reduced. Lower gaps and then lower coupling distances can be obtained using a low cost photolithographic process compared to e-beam technology. This original method proposed in this paper allows to improve the miniaturization of such porous silica micro-resonators which is of great interest for integrated optical biosensor application.

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Experimental study of the sensitivity of a porous silicon ring resonator sensor using continuous in-flow measurements

Cited by 27 publications

References 22 publications

Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Application of Miniature FBG-MEMS Pressure Sensor in Penetration Process of Jacked Pile

Submicron gap reduction of micro-resonator based on porous silica ridge waveguides manufactured by standard photolithographic process

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