Experimental Study of the Ultrasonic Vibration‐Assisted Abrasive Waterjet Micromachining the Quartz Glass

Hou, Rongguo; Wang, Tao; Lv, Zijian; Liu, Yuanyong

doi:10.1155/2018/8904234

Cited by 11 publications

(3 citation statements)

References 13 publications

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“…Abrasive jet machining is a non-conventional process whereby the surface is treated using an abrasive jet to create a specific surface shape [ 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 ]. The AJM process typically uses abrasives such as

, garnet, SiC, or diamond particles and has the capability to handle a diverse range of substrates such as metals, glass, ceramics, polymers, and composites [ 19 , 22 ].…”

Section: Through Glass Vias’ Formation and Metallization Techniquesmentioning

confidence: 99%

Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging

Yu,

Wu,

Zhong

et al. 2023

Sensors

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Glass has emerged as a highly versatile substrate for various sensor and MEMS packaging applications, including electromechanical, thermal, optical, biomedical, and RF devices, due to its exceptional properties such as high geometrical tolerances, outstanding heat and chemical resistance, excellent high-frequency electrical properties, and the ability to be hermetically sealed. In these applications, Through Glass Via (TGV) technology plays a vital role in manufacturing and packaging by creating electrical interconnections through glass substrates. This paper provides a comprehensive summary of the research progress in TGV fabrication along with its integrations, including through via formation and metallization. This paper also reviews the significant qualification and reliability achievements obtained by the scientific community for TGV technology. Additionally, this paper summarizes the application of TGV technology in various sensors such as MEMS sensors and discusses the potential applications and future development directions of TGV technology.

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, garnet, SiC, or diamond particles and has the capability to handle a diverse range of substrates such as metals, glass, ceramics, polymers, and composites [ 19 , 22 ].…”

Section: Through Glass Vias’ Formation and Metallization Techniquesmentioning

confidence: 99%

Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging

Yu,

Wu,

Zhong

et al. 2023

Sensors

View full text Add to dashboard Cite

show abstract

“…Abrasive jet machining is a non-conventional process whereby the surface is treated using an abrasive jet to create a specific surface shape [14][15][16][17][18][19][20][21][22][23][24][25][26]. The AJM process typically uses abrasives such as Al 2 O 3 , garnet, SiC, or diamond particles and has the capability to handle a diverse range of substrates such as metals, glass, ceramics, polymers, and composites [19,22].…”

Section: Through Glass Vias' Formation Techniques 211 Abrasive Jet Ma...mentioning

confidence: 99%

Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging

Yu,

Wu,

Zhong

et al. 2023

Preprint

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Glass has emerged as a highly versatile substrate for various sensor and MEMS packaging applications, including electromechanical, thermal, optical, biomedical, and RF devices, due to its exceptional properties such as high geometrical tolerances, outstanding heat and chemical resistance, excellent high-frequency electrical properties, and the ability to be hermetically sealed. In these applications, Through-Glass-Via (TGV) plays a vital role in manufacturing and packaging by creating electrical interconnections through glass substrates. This paper provides a comprehensive summary of the research progress in TGV fabrication along with their integrations, including through-via formation and metallization. The paper also reviews the significant qualification and reliability achievements obtained by the scientific community for TGV. Additionally, the paper summarizes the application of TGV technology in various sensors.

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“…In the last decade, there has been a significant increase in interest in the use of an abrasive water jet for the micromachining [ 29 , 30 ]. These applications are accompanied by a number of technical difficulties that need to be resolved [ 31 , 32 ]. These problems result in the new challenges that await scientists in this area [ 33 , 34 ].…”

Section: Introductionmentioning

confidence: 99%

Analysis of Several Physical Phenomena Measured on the Metallic Materials Cut by Abrasive Water Jets (AWJ)

et al. 2022

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Cutting using an abrasive water jet is a complex process involving several physical phenomena. This research studies some of them, mostly the influence of selected variables on the measured forces and vibrations. The traverse speed represents one of the key parameters when cutting using the AWJ. In the presented research, a set of experiments was performed on twelve different metal samples, while the force sensor measured the exerted forces and accelerometers measured the vibrations. Ten different types of steel samples of the same dimensions were cut applying five different traverse speeds. The data obtained during these measurements show that an increase in the traverse speed leads to an increase in the measured forces and vibrations. An analogous experiment performed on bronze and duralumin samples of the same dimensions, having applied higher speeds to compensate for the difference in the material structure and properties, completes the presented data. The most important results of the research are that exerted forces in the z-axis are higher than those in the x-axis, whereas measured vibrations are higher in the x-axis. According to our research, the elemental structure, especially the carbide formation, affects the measured forces and vibrations substantially.

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Experimental Study of the Ultrasonic Vibration‐Assisted Abrasive Waterjet Micromachining the Quartz Glass

Cited by 11 publications

References 13 publications

Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging

Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging

Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging

Analysis of Several Physical Phenomena Measured on the Metallic Materials Cut by Abrasive Water Jets (AWJ)

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