Radio frequency (RF) breakdown is one of the crucial factors limiting the power capacity of high-power microwave (HPM) generators. In this paper, a waveguide cavity has been designed to study quantitatively the influence of temperature on high-gradient RF breakdown. The two planes of the waveguide cavity are divided into a strong-field side and a weak-field side with the feeding of microwave signals. The temperature of the strong-field side of the waveguide cavity can be adjusted from ambient temperature (25 °C) to 435 °C by loading a resistive wire heater. The breakdown threshold of the waveguide cavity decreases apparently with the increase in the temperature. The breakdown threshold at 408 °C is 751 kV/cm, which is about 150 kV/cm lower than that at ambient temperature. In addition, the higher the temperature, the more pronounced the pulse shortening. Under the same microwave power injection, the averaged pulse width of HPM after passing through the waveguide cavity at 408 °C is equal to 17.6 ns, shortened by about 1/3 compared to that at ambient temperature. The quantitative study of the influence of temperature on the RF breakdown provides a new guideline for exploring breakdown suppression methods in HPM generators.