Experimental Study on the Operation of a Keyhole-Shaped Lens in a Microcolumn

Abstract

An advanced microcolumn is proposed which adopts a modified einzel lens structure. The newly designed einzel lens is composed of four electrodes. The two center electrodes are specially designed electrostatic quadrupole (EQ) einzel lenses having keyhole instead of circular apertures. We constructed the advanced microcolumn with the EQ-einzel lenses, and operated the newly designed microcolumn in single lens mode and double-lens mode. The preliminary results show that the EQ-einzel lens can improve the performance of the micro-column for large sample applications.

Forming a Fresnel Zone Lens: Effects of Photoresist on Digital-micromirror-device Maskless Lithography with Grayscale Exposure

“…Because grayscale values determine the final depth after development, any errors in the parameters cause considerable losses and negatively affect three-dimensional formability analysis. Thus, many optical lenses require a sample to test the optical quality after design and simulation [17][18][19][20]. A maskless lithography system can substantially reduce the cost and time required for grayscale lithography.…”