Abstract. Small sodium and silver particles were generated on dielectric substrates like LiF, quartz and sapphire under ultrahigh vacuum conditions. The optical transmission spectra of the clusters were measured as a function of cluster size and shape, for low and high substrate temperatures as well as for s-and p-polarization of the incident light. Excitation of dipolar surface plasmon oscillations in the directions normal and parallel to the substrate surface could be identified. Furthermore, optical spectra for Na and Ag clusters were calculated with the classical Mie theory. The measured spectra vary strongly if the experimental conditions are changed and can be exploited, for example, to characterize the particles with regard to their size and shape. In particular, the axial ratio of the spheroidal clusters could be determined. Its value is considerably different for the two investigated metals and depends on the substrate material. Furthermore, the temperature of the substrate has a pronounced influence on the shape of the particles. At low temperature of T = 100 K twodimensional island growth is predominant. The particles extend only little in the direction perpendicular to the surface and coalesce readily at small coverage of metal atoms. In contrast, the clusters are truly threedimensional at T = 300 K. At this stage, sodium particles still exhibit a rather small axial ratio whereas silver clusters appear almost spherical. Thus, measurements of the optical spectra permit direct in situ monitoring of cluster growth during the nucleation of adsorbed atoms and of temperature induced shape variations. In addition to investigations of the shape of the particles, the quadrupolar surface plasmon mode was observed for Ag clusters.