Experiments and simulation of the secondary effect during focused Ga ion beam induced deposition of adjacent nanostructures

Chen, Fang; Chai, Qing; Lin, Xi; Xing, Yan; Zhou, Zhipeng

doi:10.1016/j.matdes.2021.109993

Cited by 3 publications

(10 citation statements)

References 40 publications

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“…The details of the pillars are exhibited in Figure S2 . It is noted that in Figure 7 b, P e 1 is deformed due to the secondary effect [ 30 ]. To further validate our findings, we also fabricated pillar arrays behind the shading structures.…”

Section: Resultsmentioning

confidence: 99%

“…The schematic diagram of the EPMDM is shown in Figure 1 b. The surface diffusion coefficient D is taken as 1.25 μm 2 s −1 , and the residence time of precursor molecule τ is set as 0.5 s in the simulation [ 30 ].…”

Section: Methodsmentioning

confidence: 99%

“…Thus, the range and intensity of the shadow effect need to be investigated and quantified for prevention and application. In our previous study, among densely arranged structures, the secondary effect is observed, which is caused by the secondary particles in the FIBID process [ 30 ]. To minimize the secondary effect, phenanthrene is selected as the precursor gas for less scattered ions and the distance between the processing structure and shading structure is larger.…”

Section: Introductionmentioning

confidence: 99%

“…Figure S3: (a–e) The element map of the whole deposited nanostructures. (f–h) Element detection of the pillars behind shading structures [ 30 , 31 , 32 ]. Figure S4: The experimental results of the pillar arrays [ 30 ].…”

mentioning

confidence: 99%

“…(f–h) Element detection of the pillars behind shading structures [ 30 , 31 , 32 ]. Figure S4: The experimental results of the pillar arrays [ 30 ]. Figure S5.…”

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confidence: 99%

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Investigation of the Shadow Effect in Focused Ion Beam Induced Deposition

Chen

Xing

2022

Nanomaterials

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Due to the precursor gas flow in the focused ion beam induced deposition process, a shadow effect appears behind the shading structures. This article carries out experiments with phenanthrene as the precursor gas and establishes a numerical model to define the shadow area and estimate the intensity of the shadow effect, considering the morphology of shading structure, the beam shift, and the nozzle parameters. Within the shadow area, the precursor molecule adsorption contribution is estimated by calculating the fraction of precursor gas flow in a specific direction. Finally, the number of precursor molecules within the beam impact area influenced by the shadow effect is obtained, emphasizing the important role of gas surface diffusion. The adsorption contribution within the shadow area differs a lot while deposited structures are similar in height. The error between the simulation and the experimental results is about 5%, verifying the accuracy of the proposed model.

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Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

“…(f–h) Element detection of the pillars behind shading structures [ 30 , 31 , 32 ]. Figure S4: The experimental results of the pillar arrays [ 30 ]. Figure S5.…”

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confidence: 99%

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Investigation of the Shadow Effect in Focused Ion Beam Induced Deposition

Chen

Xing

2022

Nanomaterials

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Pattern generation method and prediction model of nanohelices fabricated by focused ion beam induced deposition

Chen

Chai

Chen

et al. 2022

Precision Engineering

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The chiral coating on an achiral nanostructure by the secondary effect in focused ion beam induced deposition

et al. 2022

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Optical metamaterials are widely used in electromagnetic wave modulation due to their sub-wavelength feature sizes. In this paper, a method to plate an achiral nanopillar array with chiral coating by the secondary effect in focused ion beam induced deposition is proposed. Guided by the pattern defined in a bitmap with variable residence time, the beam scan strategy suppresses the interaction between adjacent nanostructures. A uniform chiral coating is formed on the target nanostructure without affecting the adjacent nanostructure, under carefully selected beam parameters and the rotation angle of the sample stage. Energy Dispersive X-Ray Spectroscopy results show that the chiral film has high purity metal, which enables the generation of localized surface plasmon resonances and causes the circular dichroism under circularly polarized light illumination. Finally, the tailorable circular dichroism spectrum of the coated array is verified by the Finite Difference Time Domain method.

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Experiments and simulation of the secondary effect during focused Ga ion beam induced deposition of adjacent nanostructures

Cited by 3 publications

References 40 publications

Investigation of the Shadow Effect in Focused Ion Beam Induced Deposition

Investigation of the Shadow Effect in Focused Ion Beam Induced Deposition

Pattern generation method and prediction model of nanohelices fabricated by focused ion beam induced deposition

The chiral coating on an achiral nanostructure by the secondary effect in focused ion beam induced deposition

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