Exploration of Photocatalytic Chlorination Combined Simplified Distillation to Produce Electronic Grade High-Purity Trichlorosilane Via Microchannel Reactor Experiments, Multiphase-Flow Simulation, Reaxff Md, and Dft

Chlorination of trichlorosilane/chlorodimethylsilane using metal chlorides: experimental and mechanistic investigations

“…Typical chlorine sources for the chlorination reactions of CH 3 SiHCl 2 are chlorine gas, 8 chlorinated hydrocarbons 6,9 and chlorosilane. 4,10,11 Wan et al 8 proposed photochlorination of CH 3 SiHCl 2 with Cl 2 in a continuous microchannel reactor. The results showed that the removal rate of CH 3 SiHCl 2 was as high as 99.67% under the optimal reaction conditions.…”