“…So far, glory fruits have been achieved in experimental and theoretical studies, and massive literatures can be obtained also, such as the theoretical analysis presented by Povarnitsyn et al [1][2] ,which was based on the classical heat transfer theory and studied the ablation model of target materials under a single pulse laser beam; On consideration of the material constitutive effects, Wang et al [3] described the connected effects among micro-damages in the late damage stage by using a stress relaxation function, they also performed the numerical simulations of dynamic mechanical response and spallation failure experiments of aluminum under high laser irradiation. By using the microanalysis on aramid fiber reinforced plastics sample recovered from the ablation experiments in different laser power, Wang et al [4] obtained the thermal damage morphology and damage physic-chemical processes under different laser parameters; with the help of electromagnetic device, Ebihara [5] deposited high quality ZnO nano-structure film by using the separated pulsed laser deposition (SPLD), Cultrera [6] studied the strong emission of particulates towards the incident beam direction in pulsed-laser ablation experiments; in order to predict where, when, and what stresses occur during laser grooving, Xiang et al [7] proposed a three-dimensional elastic stress model and integrated it into ablation solution; with a Gauss function standing for the pulsed laser power density distribution, Zhang et al [8] discussed the effect of the pulsed laser power density distribution function on temperature distribution of the target surface before melting in ablation process; Christensen et al [9] simulated the two-temperature model Au, Ag, Cu and Al and proposed an analytical model for the ablation rates in the high fluency regime; Mullenix and Povitsky [10] developed a laser ablation model and pointed out one can control the total mass ablated and the mass transfer rate by changing this interval. Although the materials response in laser irradiation has been studied intensively, studies on how to reduce internal damages in MEMS laser fabrication can hardly be seen.…”