“…It is commonly accepted that the pyrolysis occurs through a series of chemical reactions, including SiASi bond formation and hydrogen elimination, producing silanes with increasing number of Si atoms [13,20,22,23,28,29]. Additionally, 1,2-hydrogen shifts, ring opening and ring closing lead to interconversion between different isomers within each silane family [22,23,30,31]. Many of the kinetic models of the monosilane pyrolysis process have an impressive degree of detail, some of which include hundreds of species with up to 10 Si atoms and more than one thousand chemical reactions [16,[21][22][23]27].…”