Extended range phase-sensitive swept source interferometer for real-time dimensional metrology

Shen, Yi; Ding, Zhihua; Yan, Yangzhi; Wang, Chuan; Yang, Yong; Zhang, Yudong

doi:10.1016/j.optcom.2013.12.065

Cited by 6 publications

(4 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…The proposed technique can be utilized in order to improve the resolution of EFPI sensors in the case when a relatively large value of its OPD (L > 200 μm) is necessary, as for example, in [8,21,22]. Another attractive application of the proposed noise compensation approach is resolution improvement in spectral interferometric sensing systems, utilizing relatively cheap and simple interrogating units with poor wavelength scale repeatability.…”

Section: Resultsmentioning

confidence: 99%

Enhancing the resolution limits of spectral interferometric measurements with swept-wavelength interrogation by means of a reference interferometer

2015

View full text Add to dashboard Cite

An approach for compensating the influence of interrogator noises on the readings of interferometric sensors, interrogated by means of spectral interferometry with wavelength tuning, is proposed. Theoretical analysis and a proof-of-principle experiment were performed for the example of extrinsic Fabry-Perot interferometers. Two schemes, comprised of a signal and reference interferometers, switched in different optical channels of the interrogating unit, were proposed. The approach is based on the fact that the fluctuations of some of the interrogator parameters produce correlated fluctuations of the reference and signal interferometers' optical path differences' (OPDs) measured values. The fluctuations of the reference interferometer's measured OPD can be subtracted from the measured OPD of the signal interferometer. The fluctuations of different parameters of the interrogator are considered, the correlation properties of the produced noises of the measured OPD values are demonstrated. The first scheme contains two interferometers with similar parameters and enabled a threefold resolution improvement in the performed experiments, when the difference of the interferometers OPDs was varied within about 10 nm. The second scheme contains two interferometers with OPDs difference such that all interrogator fluctuations, except for the dominating one, produce uncorrelated OPD errors. With the second scheme, a twofold resolution improvement was experimentally demonstrated when the interferometers' OPDs difference was varied within more than 1 μm. The proposed approach can be used for improving the resolution of interferometric sensors with relatively large OPDs (greater than 200-300 μm), which can be advantageous for remote materials and surface inspection. The other potential application is the use of relatively simple cheap interrogators with poor wavelength scale repeatability for high-precision measurements.

show abstract

Section: Resultsmentioning

confidence: 99%

Enhancing the resolution limits of spectral interferometric measurements with swept-wavelength interrogation by means of a reference interferometer

2015

View full text Add to dashboard Cite

show abstract

“…At first, a high-pass filter was used to remove the DC component of the interference signal. By employing the Hilbert transform, 30,31 the envelope used for normalization was obtained. The chirp Fourier transform 32,33 was then applied allowing selecting a given bandwidth.…”

Section: Detection and Processingmentioning

confidence: 99%

Interferometric system based on swept source-optical coherence tomography scheme applied to the measurement of distances of industrial interest

et al. 2016

View full text Add to dashboard Cite

We used an interferometric technique based on typical optical coherence tomography (OCT) schemes for measuring distances of industrial interest. The system employed as a light source a tunable erbium-doped fiber laser of ∼20-pm bandwidth with a tuning range between 1520 and 1570 nm. It has a sufficiently long coherence length to enable long depth range imaging. A set of fiber Bragg gratings was used as a self-calibration method, which has the advantage of being a passive system that requires no additional electronic devices. The proposed configuration and the coherence length of the laser enlarge the range of maximum distances that can be measured with the common OCT configuration, maintaining a good axial resolution. A measuring range slightly >17 cm was determined. The system performance was evaluated by studying the repeatability and axial resolution of the results when the same optical path difference was measured. Additionally, the thickness of a semitransparent medium was also measured.

show abstract

“…Dado que el actuador piezoeléctrico que controla el F-P no tiene una respuesta lineal con la alimentación y que además presenta histéresis entre el ciclo de expansión y compresión, se requiere un análisis detallado de este sistema para su utilización como sistema de medición de distancias. En la literatura reciente se utilizan sistemas en paralelo que miden en forma continua la longitud de onda en función del tiempo de barrido [18][19][20]. Para esto se utilizan generalmente interferómetros Mach-Zehnder (MZI), con fotodiodos apareados.…”

Section: B Sistema Experimentalunclassified

System based on low coherence interferometry for long distance measurement

Morel

Torga

Russo

et al. 2015

2015 XVI Workshop on Information Processing and Control (RPIC)

View full text Add to dashboard Cite

show abstract

Extended range phase-sensitive swept source interferometer for real-time dimensional metrology

Cited by 6 publications

References 19 publications

Enhancing the resolution limits of spectral interferometric measurements with swept-wavelength interrogation by means of a reference interferometer

Enhancing the resolution limits of spectral interferometric measurements with swept-wavelength interrogation by means of a reference interferometer

Interferometric system based on swept source-optical coherence tomography scheme applied to the measurement of distances of industrial interest

System based on low coherence interferometry for long distance measurement

Contact Info

Product

Resources

About