2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference 2011
DOI: 10.1109/asmc.2011.5898206
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Extendible scanner platforms for mass production, now and in the future

Abstract: Increasing demand in technology requirements from IC manufacturers has necessitated that photolithography equipment suppliers design and build tools with many advanced capabilities. These additional features not only add to the complexity of the tools, but also increase the cost. Therefore, in order to keep lithography affordable, it is essential that equipment suppliers increase equipment productivity and extend tool lifetimes to support multiple process generations.As a further challenge, the requirements fr… Show more

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