Extension and Limits of Depolarization-Fringe Contrast Roughness Method in Sub-Micron Domain

Abstract

To guarantee quality standards for the industry, surface properties, particularly those of roughness, must be considered in many areas of application. Today, several methods are available on the market, but some damage the surface to be tested as they measure it by contact. A non-contact method for the precise estimation of sub-micron roughness values is presented, which can be used as an extension of existing roughness measurement techniques to improve them further considering the depolarized light reflected by the sample. This setup is based on a Michelson interferometer, and by introducing a quarter-wave plate on a half part of the reference mirror, the surface roughness can be directly derived by measuring the fringe contrasts. This article introduces a simple model describing the intensity distortions resulting from the microscopic roughness in divided interferograms when considering depolarization. This work aimed to extend the measurement range of the technique developed in a previous work, in which depolarization effects are taken into account. For verification, the experimental results were compared with the fringe contrast technique, which does not consider the depolarization of the scattered light, especially regarding the extended wavelength interval, highlighting the limits of the technique. In addition, simulations of the experiments are presented. For comparison, the reference values of the sample roughness were also generated by measurements with a stylus profiler.