External Alignment Marks Technique for Front-to-Back Side Alignment Using Single-Side Mask Aligner

Abdollahi, Hassan; Samaeifar, Fatemeh; Afifi, Ahmad; Aliahmadi, Majidreza

doi:10.1007/s40799-017-0213-2

Cited by 5 publications

(1 citation statement)

References 25 publications

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“…The requirement to use of green materials also adds additional constraints [15,16]. Conventionally, humidity sensors have been manufactured on rigid structures like glass or ceramics, using techniques such as photolithography and sputtering [17][18][19]. These techniques are relatively expensive, time consuming, and require high vacuum processes, and therefore do not satisfy the cost constraints of the packaging industry.…”

Section: Introductionmentioning

confidence: 99%

Highly sensitive and fully printable humidity sensor on a flexible substrate based on a zinc oxide and polyethylenimine composite

Samaeifar

Azadinia²,

Ghorbani³

et al. 2022

Flex. Print. Electron.

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We report a highly sensitive and fully printable capacitive humidity sensor based on a zinc oxide (ZnO) and polyethylenimine (PEI) composite. The sensor has a simple structure, consisting only of a layer of the ZnO:PEI composite, coated using an ethanol solution, on a layer of silver inter-digital electrodes (IDEs) that have been pre-printed on a polyethyleneterephthalate (PET) substrate. The sensor with ZnO:PEI in the ratio of 2:1 by volume exhibits a response of 43,907,000% at maximum humidity, with a detection range of 15% to 95% relative humidity (RH), higher than other sensors fully made by wet-coating processes. Fourier transform infrared spectroscopy (FTIR), atomic force microscopy (AFM), and scanning electron microscopy (SEM) measurements suggest that the high response likely arises from the use of a hydrophilic polymer with a high dipole moment which facilitates dipole-dipole interactions with water molecules and from the highly granular morphology of the composite which leads to a high surface-to-volume ratio and more-numerous water adsorption sites. The fabricated sensor also demonstrates short response/recovery times (5 s/3 s), good repeatability over multiple humidification and desiccation cycles, and only 5% loss in response after being kept in the ambient for three weeks.

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