2017
DOI: 10.7567/jjap.56.116602
|View full text |Cite
|
Sign up to set email alerts
|

Extracting calibrated parameters from imaging ellipsometric measurement

Abstract: Ellipsometry is a standard metrology tool for measuring thin films and characterizing surfaces. As an extension of single-point ellipsometry, imaging ellipsometry is implemented by replacing a detector with an imaging system and a detection array. The compensator used in an ellipsometer is often nonideal. In single point ellipsometry, the beam is aligned in an effort to pass it through the center of the compensator, and the retardation error is considered to remain near-constant during compensator rotation. In… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
5
0

Year Published

2018
2018
2023
2023

Publication Types

Select...
5
3

Relationship

3
5

Authors

Journals

citations
Cited by 10 publications
(5 citation statements)
references
References 28 publications
0
5
0
Order By: Relevance
“…For the Si thin film / quartz (Si/SiO2) sample, the reflection and transmission ellipsometric parameters were acquired with a home-built ellipso-microscope, which can be used in either reflection or transmission configurations. Figures 1 illustrates the optical arrangement of the ellipso-microscope, which was built based on our previous work [13][14][15][16]. The light from the Xenon lamp passes through an optical filter (=5905 nm), a convergence lens system (NAc=0.0088), a linear Gran-Thompson polarizer, and a compensator (a quarter wave-plate).…”
Section: Instrumentationmentioning
confidence: 99%
“…For the Si thin film / quartz (Si/SiO2) sample, the reflection and transmission ellipsometric parameters were acquired with a home-built ellipso-microscope, which can be used in either reflection or transmission configurations. Figures 1 illustrates the optical arrangement of the ellipso-microscope, which was built based on our previous work [13][14][15][16]. The light from the Xenon lamp passes through an optical filter (=5905 nm), a convergence lens system (NAc=0.0088), a linear Gran-Thompson polarizer, and a compensator (a quarter wave-plate).…”
Section: Instrumentationmentioning
confidence: 99%
“…It characterizes surfaces with micro-patterns or non-uniform distribution from a single measurement. 1,[4][5][6][7][8][9][10][11] The spatial resolution of an imaging ellipsometer depends on that of the microscope. 12) The imaging ellipsometer collects reflection beams with a microarray sensor through the imaging system, and every microarray pixel element is used as a single ellipsometer.…”
mentioning
confidence: 99%
“…2,3) Single point measurement spectroscopic ellipsometry [4][5][6] is currently the mainstream of the instrumentation. Some ellipsometry like phase-modulated ellipsometry 7) and imaging ellipsometry [8][9][10] have the need for wavelength-by-wavelength measurements to obtain ellipsometric parameters spectra. The necessity of wavelength-bywavelength measurements, by scanning incident or output lights with an optical filter or monochromator, drags down the speed of the whole data acquirement.…”
mentioning
confidence: 99%