MEMS/MOEMS Components and Their Applications III 2006
DOI: 10.1117/12.648977
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Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror

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Cited by 28 publications
(17 citation statements)
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“…Closed-loop wavefront data presented in prior works [60,61] were obtained with a windowed device. The data presented here were obtained without a window because the window was found to introduce ghost images, which reduced contrast by a small but not negligible amount of 1 × 10 −7 .…”
Section: Experimental Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Closed-loop wavefront data presented in prior works [60,61] were obtained with a windowed device. The data presented here were obtained without a window because the window was found to introduce ghost images, which reduced contrast by a small but not negligible amount of 1 × 10 −7 .…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Errors in each of these tasks leads to errors in performance and these are summarized in an error budget. Preliminary work with the MEMS device, including some of the engineering challenges leading up to this result, have been presented in prior works [71,63,61]. A complete inventory of these difficulties, together with our mitigation techniques, is included here.…”
Section: Introductionmentioning
confidence: 99%
“…These mirrors were tested at BMC and also extensively at the LAO. [5][6][7][8][9][10] The final, winning design was based on the actuator used in the BMC 140 MEMS. This actuator has a total stroke of more than 4 microns (for the center of a 3 × 3 actuator patch) along with excellent surface quality of less than 5 nm RMS surface print-through and actuator scalloping.…”
Section: Development Of Mems Dmmentioning
confidence: 99%
“…ExAO refers to a family of planned ground-based instruments intended for observation of exoplanets using ultra high resolution First conférence on Adaptive Optics for Extremely Large Telescopes DMs having thousands or tens of thousands of actuators. In addition to exoplanet detection, an ExAO system will be capable of characterizing dust disks around stars and could allow high Strehl ratio imaging at visible wavelengths [7][8][9].…”
Section: Motivation For High-resolution Wavefront Correctionmentioning
confidence: 99%