Extreme ultraviolet metalens by vacuum guiding

Ossiander, Marcus; Meretska, Maryna L.; Hampel, Hana Kristin; Lim, Soon Wei Daniel; Knefz, Nico; Jauk, Thomas; Capasso, Federico; Schultze, Martin

doi:10.1126/science.adg6881

Cited by 78 publications

(31 citation statements)

References 60 publications

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“…For instance, full Stokes polarimetry imaging has been realized with a single metasurface coupled to a commercial camera sensor, 26−28 and an ultrathin perforated membrane metalens has been used to focus extreme ultraviolet radiation in transmission. 29 With precision design and manufacturing, metalenses have achieved diffraction-limited, high-efficiency performance, 30,31 and have attained broadband aberration correction when used in conjunction with existing refractive optics. 32,33 To design a 100 mm diameter metalens, we first divide the 100 mm diameter region into 25 square sections (5 × 5 square array).…”

Section: Resultsmentioning

confidence: 99%

All-Glass 100 mm Diameter Visible Metalens for Imaging the Cosmos

Park,

Lim,

Amirzhan

et al. 2024

ACS Nano

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Metasurfaces, optics made from subwavelength-scale nanostructures, have been limited to millimeter-sizes by the scaling challenge of producing vast numbers of precisely engineered elements over a large area. In this study, we demonstrate an all-glass 100 mm diameter metasurface lens (metalens) comprising 18.7 billion nanostructures that operates in the visible spectrum with a fast f-number (f/1.5, NA = 0.32) using deep-ultraviolet (DUV) projection lithography. Our work overcomes the exposure area constraints of lithography tools and demonstrates that large metasurfaces are commercially feasible. Additionally, we investigate the impact of various fabrication errors on the imaging quality of the metalens, several of which are specific to such large area metasurfaces. We demonstrate direct astronomical imaging of the Sun, the Moon, and emission nebulae at visible wavelengths and validate the robustness of such metasurfaces under extreme environmental thermal swings for space applications.

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Section: Resultsmentioning

confidence: 99%

All-Glass 100 mm Diameter Visible Metalens for Imaging the Cosmos

Park,

Lim,

Amirzhan

et al. 2024

ACS Nano

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“…This strategy to prevent the intrinsic losses of material could be expended to other similar systems, realizing silicon-based light confinement down to the ultraviolet and extreme ultraviolet spectral range. [38,39] In addition, combining with the mode mismatch design, we realized a high-quality silicon-based bulk cavity in the visible range, which had potential applications in sensing and lasing. The deep-subwavelength r-LDOS detail also provided vital instruction for the optical emitter placement, facilitating the precise control of position-dependent light-matter interactions.…”

Section: Discussionmentioning

confidence: 99%

Super‐Resolved Bulk States of Photonic Crystals With Cathodoluminescence Microscopy

Liu

Dang

et al. 2023

Laser & Photonics Reviews

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Progress in photonic crystals (PhCs) enables the advanced manipulation of light propagation, leading to strong light–matter interactions and unconventional applications. To explore the physical nature and realize the precise and efficient control of position‐dependent light–matter interactions, the direct deep‐subwavelength characterization of PhC states is pivotal. Here, the super‐resolved visualization of bulk states in the z‐direction asymmetric dielectric PhC is realized by characterizing the radiative local density of optical states, including the etched hole area. An accelerating voltage scanning approach is proposed to selectively probe bulk states and substrates, elucidating the electron–matter interactions affected by the electron‐beam energy. The bulk state energy is demonstrated to be confined inside structure holes as shown by the cathodoluminescence intensity mappings of PhCs with different geometrical parameters, enabling the design of a silicon‐based high‐quality cavity in the visible range. This work provides a deep investigation of the depth‐dependent interaction between the electron beam and dielectric PhCs, promoting the characterization of PhC delocalized modes. The deep‐subwavelength detail of bulk state benefits the future nanoscale manipulation of light–matter interactions and the optimization of quantum emission devices.

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“…Many of these materials have already seen application in the development of UV-efficient and solar-blind sensor technologies for astronomy [281,301]. A novel advance is a 2nd-harmonic-generating and focusing metalens using ZnO resonators for the vacuum UV [282] and a first XUV metalens [283]. See figures 14(b), (c) and 15(b) for an overview of potential UV astrophotonics materials.…”

Section: Materials Choices and Fabrication Platformsmentioning

confidence: 99%

2023 Astrophotonics Roadmap: pathways to realizing multi-functional integrated astrophotonic instruments

Jovanovic,

Gatkine,

Anugu

et al. 2023

J. Phys. Photonics

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Photonic technologies offer numerous functionalities that can be used to realize astrophotonic instruments. The most spectacular example to date is the ESO Gravity instrument at the Very Large Telescope in Chile that combines the light-gathering power of four 8-m telescopes through a complex photonic interferometer. Fully integrated astrophotonic devices offer critical advantages for instrument development, including extreme miniaturization when operating at the diffraction-limit, plus integration, superior thermal and mechanical stabilization owing to the small footprint, and high replicability offering significant cost savings. Numerous astrophotonic technologies have been developed to address shortcomings of conventional instruments to date, including the development of photonic lanterns to convert from multimode inputs to single mode outputs, complex aperiodic fiber Bragg gratings to filter OH emission from the atmosphere, beam combiners enabling long baseline interferometry with for example, ESO Gravity, and laser frequency combs for high precision spectral calibration of spectrometers. Despite these successes, the facility implementation of photonic solutions in astronomical instrumentation is currently limited because of 1) low throughputs from coupling to fibers, coupling fibers to chips, propagation and bend losses, device losses, etc., 2) difficulties with scaling to large channel count devices needed for large bandwidths and high resolutions, and 3) efficient integration of photonics with detectors. In this roadmap, we identify 23 key areas that need further development. We outline the challenges and advances needed across those areas covering design tools, simulation capabilities, fabrication processes, the need for entirely new components, integration and hybridization and the characterization of devices. To realize these advances the astrophotonics community will have to work cooperatively with industrial partners who have more advanced manufacturing capabilities. With the advances described herein, multi-functional integrated instruments will be realized leading to novel observing capabilities for both ground and space based platforms, enabling new scientific studies and discoveries.

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Extreme ultraviolet metalens by vacuum guiding

Cited by 78 publications

References 60 publications

All-Glass 100 mm Diameter Visible Metalens for Imaging the Cosmos

All-Glass 100 mm Diameter Visible Metalens for Imaging the Cosmos

Super‐Resolved Bulk States of Photonic Crystals With Cathodoluminescence Microscopy

2023 Astrophotonics Roadmap: pathways to realizing multi-functional integrated astrophotonic instruments

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