Extremely high-aspect-ratio ultrafast Bessel beam generation and stealth dicing of multi-millimeter thick glass

Meyer, Rémi; Froehly, Luc; Giust, Remo; Hoyo, Jesús del; Furfaro, Luca; Billet, Cyril; Courvoisier, F.

doi:10.1063/1.5096868

Cited by 65 publications

(31 citation statements)

References 36 publications

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“…Considering the Bessel beam has long nondiffracting length compared to the traditional Gaussian beam, they can be used for direct-write of feature in the bulk or on the surfaces or through drilling in transparent materials [ 27 , 45 ]. It is necessary and meaningful to study the effect of the relative position of the pulse Bessel beams to exit surface on nano-structure morphology and dimension [ 10 ].…”

Section: Discussion About Nano-structure On Exit Surfacementioning

confidence: 99%

“…These features make Bessel beams attractive in the field of laser machining. Here specifically, ultra-high aspect ratio (depth/diameter) nanovoids exceeding 1000:1 have been reported using ultrafast micro-Bessel beams [ 8 , 9 , 10 ]. They result from a strong energy concentration due to Bessel exposure, where the relaxation direction occurs perpendicular to the axis and results in the formation of nano-voids.…”

Section: Introductionmentioning

confidence: 99%

“…This structuring process is remarkable by its dimensions and thus new approaches for the conception of the 3D photonic crystals, phonon crystals, metamaterials, integrated photonics devices, beam welding, and plasmonic devices could rely on this unique fabrication technique [ 11 , 12 , 13 , 14 , 15 ]. Typically, these embedded holes have taper-free profiles, hundreds of nanometers in diameter and a few hundreds of micrometers in-depth, as reported for example in fused silica and sapphire [ 10 , 16 ]. Notwithstanding the effectiveness of short pulse duration Gaussian-Bessel beams for drilling high aspect ratio channels, it is also possible to precisely manipulate the characteristics of the fabricated holes and to access diverse aspect ratios by regulating the beam parameters [ 17 , 18 , 19 ] or by phase engineering [ 20 , 21 ].…”

Section: Introductionmentioning

confidence: 99%

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Reconstructing of Embedded High-Aspect-Ratio Nano-Voids Generated by Ultrafast Laser Bessel Beams

et al. 2020

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Ultrafast non-diffractive Bessel laser beams provide strong light confinement and show robust advantages for fabricating high-aspect-ratio nanoscale structures inside transparent materials. They take the form of nanoscale voids with typical diameters well below the wavelength and aspect ratio of more than 1000. Delivering 3D morphologies of such nanoscale voids is an important issue to evaluate the result for fabrication. However, the characterization of such laser-induced structures is a difficult task. Here, an accurate and time-saving tomography-like methodology is proposed and adopted for reconstructing the morphology of high-aspect-ratio nano-holes. The technique allows an accurate assertion of laser parameters and position on nano-structured features. The reconstructed configuration reveals that nanoholes morphologies have a close relationship with energy distribution in the focal region. It suggests that the configuration of micro-explosion can be controlled by laser energy deposition in the process of laser-matter interaction down to the nanoscale.

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Section: Discussion About Nano-structure On Exit Surfacementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Reconstructing of Embedded High-Aspect-Ratio Nano-Voids Generated by Ultrafast Laser Bessel Beams

et al. 2020

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“…In particular, finite-energy Bessel beams (BB) [5] have been the object of intense research and applications in different fields. Thanks to their self-reconstruction property, their elongated focal zone (orders of magnitude longer than the Rayleigh range of a Gaussian beam focused down to the same core dimension) and the capacity of maintaining a smooth longitudinal fluence profile under both linear propagation and nonlinear propagation [6], BB have been used in micromanipulation [7], microscopy [8], micro-and nanostructuring [9][10][11][12][13][14][15][16] and cutting [17][18][19][20] of transparent materials.…”

Section: Introductionmentioning

confidence: 99%

Etching and drilling of through-holes in thin glass by means of picosecond Bessel beams

2019

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In this paper, we present a laser etching and drilling technique for thin glass materials based on the use of finite-energy pulsed Bessel beams orthogonally impinging on the sample surface. Thanks to the elongated focal zone of the quasinon-diffractive beam, the laser processing can be performed without scanning the beam position along the thickness of the transparent material sample, but simply moving the sample in the plane orthogonal to the beam. We first present the results of single-shot glass microfabrication performed to identify the optimal laser parameters needed for an efficient internal material ablation. We then describe the micromachining technique used for etching the dielectric material at glass-air interfaces and for generating, without chemical etching, through-holes in thin glasses.

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“…The as-generated beam can be demagnified and re-imaged to the workpiece by relay optics [51], with micron-sized cores and aspect ratios exceeds easily a factor 100 in processing conditions. Multi-axicon setup was recently used to obtain record aspect ratios over 10,000 [52].…”

Section: Bessel-gauss Beamsmentioning

confidence: 99%

High-resolution material structuring using ultrafast laser non-diffractive beams

Stoian

Bhuyan

Rudenko

et al. 2019

Advances in Physics: X

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Scales in the 100 nm range represent a generic cornerstone for laser material processing, enabling novel size-dependent functions on surfaces and in the bulk and thus a new range of technological applications. On these scales, the processed material acquires optical, transport or contact properties that do not only rely on local effects on singular topographic features but involve increasingly collective behaviors. Rapid access to sub-100 nm features with intense coherent light represents nevertheless a challenge in laser structuring in view of the optical diffraction limit. Ultrafast non-diffractive beams with controllable time envelopes can overcome this limit and achieve super-resolved processing, a prerequisite for the next generation of flexible and precise material processing tools. They show a remarkable capacity of structuring transparent materials with high degree of accuracy and exceptional aspect ratio. This capacity relies on triggering fast hydrodynamic and material fracture effects with characteristic spatial scales in the nm range. Reviewing the present achievements and technical potential, we discuss from a dynamic viewpoint the physical mechanisms enabling structural features beyond diffraction limit achieved using ultrafast Bessel beams and indicate applications of high technical relevance. ARTICLE HISTORY

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Extremely high-aspect-ratio ultrafast Bessel beam generation and stealth dicing of multi-millimeter thick glass

Cited by 65 publications

References 36 publications

Reconstructing of Embedded High-Aspect-Ratio Nano-Voids Generated by Ultrafast Laser Bessel Beams

Reconstructing of Embedded High-Aspect-Ratio Nano-Voids Generated by Ultrafast Laser Bessel Beams

Etching and drilling of through-holes in thin glass by means of picosecond Bessel beams

High-resolution material structuring using ultrafast laser non-diffractive beams

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