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Superconducting Layers by Gallium Implantation and Short-Term Annealing in Semiconductors

“…Intense structural investigations of the su- * corresponding author; e-mail: jan.fiedler@hzdr.de perconducting layers clearly exclude Ga clusters with a size of more than 3 nm [12]. As Ga itself is a superconducting element with various superconducting phases showing critical temperatures between 1 K and 12 K [17], the question has to be addressed, how superconducting precipitates inuence the low temperature transport properties. A high uence Ga implantation in Si can be used for this task because of the low equilibrium solid solubility of 0.1 at.% [18], leading to Ga precipitation [1921].…”