F/sub 2/-lasers: high-resolution micromachining system for shaping photonic components

Herman, Peter R.; Chen, K.P.; Wei, M.; Zhing, Jie; Ihlemann, J.; Schäfer, D.; Marowsky, G.; Oesterlin, Peter; Burghardt, B.

doi:10.1109/cleo.2001.948180

Cited by 7 publications

(7 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Large features were machined to a depth of 500 μm into the substrate using a computer-controlled mill (Haas Automation Inc., Oxnard, CA) according to the design shown in Figure a. Microchannels were manufactured using a microfabrication system based on a molecular fluorine (F 2 , 157 nm) excimer laser described previously . Briefly, the system generates a spatially uniform (±5%) pulsed laser beam illuminating a free-standing aluminum mask containing exposed features which are imaged by a 25× Schwarzschild objective onto the substrate.…”

Section: Methodsmentioning

confidence: 99%

Microfabricated System for Parallel Single-Cell Capillary Electrophoresis

Munce

Herman

et al. 2004

Anal. Chem.

View full text Add to dashboard Cite

Performing single-cell electrophoresis separations using multiple parallel microchannels offers the possibility of both increasing throughput and eliminating cross-contamination between different separations. The instrumentation for such a system requires spatial and temporal control of both single-cell selection and lysis. To address these problems, a compact platform is presented for single-cell capillary electrophoresis in parallel microchannels that combines optical tweezers for cell selection and electromechanical lysis. Calcein-labeled acute myloid leukemia (AML) cells were selected from an on-chip reservoir and transported by optical tweezers to one of four parallel microfluidic channels. Each channel entrance was manufactured by F2-laser ablation to form a 20- to 10-microm tapered lysis reservoir, creating an injector geometry effective in confining the cellular contents during mechanical shearing of the cell at the 10-microm capillary entrance. The contents of individual cells were simultaneously injected into parallel channels resulting in electrophoretic separation as recorded by laser-induced fluorescence of the labeled cellular contents.

show abstract

Section: Methodsmentioning

confidence: 99%

Microfabricated System for Parallel Single-Cell Capillary Electrophoresis

Munce

Herman

et al. 2004

Anal. Chem.

View full text Add to dashboard Cite

show abstract

“…1). It has been described in detail previously [Herman et al (2001)]. Ablative processing of materials is performed in a mask projection configuration.…”

Section: Laser Systemmentioning

confidence: 99%

Laser Fabrication of Silica Gratings by Ablation and Modification of Silicone Films

2014

Self Cite

View full text Add to dashboard Cite

Silicone (polydimethylsiloxane) films are irradiated with a nanosecond F 2 -laser at a wavelength of 157 nm. Low fluence irradiation < 100 mJ/cm² causes elimination of the organic groups leading to the formation of silica like material. Irradiation at fluences > 200 mJ/cm² causes precise ablation of the silicone material. By combining ablative patterning and low fluence modification, the fabrication of silica devices with precise shape control is possible. Using spin coating of a diluted silicone solution (type ACCUGLASS), the preparation of thin silicone films (100 nm to 1 μm thickness) is possible. High resolution patterns like surface relief gratings with 1 μm period are obtained in these films by patterned ablation using a mask projection system and subsequent large area irradiation for the modification to silica. The chemical modification to carbon free silica is confirmed by Raman spectroscopy.

show abstract

“…It is depicted schematically in Figure 1 and has been described in detail previously. 9 The laser delivers up to 25 mJ single-pulse energy with ≈ 15 ns pulse duration at 1 to 200 Hz repetition rate. Homogenization and imaging optics are assembled in a 3 m long aluminum chamber, which is flushed with nitrogen gas to provide transparency at 157 nm.…”

Section: Fiber-lens Fabricationmentioning

confidence: 99%

Micro-lens machining on optical fibers by direct laser ablation

Fricke-Begemann

Ihlemann

et al. 2004

Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education

View full text Add to dashboard Cite

Beam shaping at the output of optical fibers is required in a variety of applications including optical sensors, telecommunication devices and medical applications. We present a laser micro-machining technique for the fabrication of micro-lenses directly upon the end face of silica fibers using a F 2 -laser processing station. Ablation is performed in a mask projection arrangement with 25x demagnification. A mask with an occluded circular beam shape is imaged perpendicular to the fiber axis. The fiber is rotated axially while the laser cuts through the fiber, yielding a spherically shaped tip with radius defined by the mask dimensions. Strong 157 nm absorption by the silica glass facilitates precise structuring without micro-crack formation. The quality of the fiber-lenses is characterized by AFM, SEM and by analysing the beam profile at the fiber output.

show abstract

F/sub 2/-lasers: high-resolution micromachining system for shaping photonic components

Cited by 7 publications

References 9 publications

Microfabricated System for Parallel Single-Cell Capillary Electrophoresis

Microfabricated System for Parallel Single-Cell Capillary Electrophoresis

Laser Fabrication of Silica Gratings by Ablation and Modification of Silicone Films

Micro-lens machining on optical fibers by direct laser ablation

Contact Info

Product

Resources

About