Fabricating embedded SU-8 microstructures with asymmetric inside cross section by double-side multiple partial exposure method

Huang, Yuan-Te; Hsu, Wensyang

doi:10.1016/j.mee.2014.03.022

Cited by 4 publications

(2 citation statements)

References 11 publications

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“…The one-time exposure method can satisfy this requirement of chip, a transparent substrate (e.g., cover glass) is needed for light pass during lithography and let the optical signal pass through during the detection. So compared with the traditional two-side exposure method 34 , we provided the method which was more simple, flexible and convenient to fabricate aligned microchannels by UV exposure once, and during the fabrication, the method does not require the alignment process. SEM images of the twin microchannels are shown in Fig.…”

Section: Resultsmentioning

confidence: 99%

Integrated optofluidic-microfluidic twin channels: toward diverse application of lab-on-a-chip systems

Xia

Guan

et al. 2016

Sci Rep

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Optofluidics, which integrates microfluidics and micro-optical components, is crucial for optical sensing, fluorescence analysis, and cell detection. However, the realization of an integrated system from optofluidic manipulation and a microfluidic channel is often hampered by the lack of a universal substrate for achieving monolithic integration. In this study, we report on an integrated optofluidic-microfluidic twin channels chip fabricated by one-time exposure photolithography, in which the twin microchannels on both surfaces of the substrate were exactly aligned in the vertical direction. The twin microchannels can be controlled independently, meaning that fluids could flow through both microchannels simultaneously without interfering with each other. As representative examples, a tunable hydrogel microlens was integrated into the optofluidic channel by femtosecond laser direct writing, which responds to the salt solution concentration and could be used to detect the microstructure at different depths. The integration of such optofluidic and microfluidic channels provides an opportunity to apply optofluidic detection practically and may lead to great promise for the integration and miniaturization of Lab-on-a-Chip systems.

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Section: Resultsmentioning

confidence: 99%

Integrated optofluidic-microfluidic twin channels: toward diverse application of lab-on-a-chip systems

Xia

Guan

et al. 2016

Sci Rep

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“…The partial exposure approach is a promising technique to fabricate small SU8 channels [41][42][43][44][45]. In this approach, the top wall of the channel is established using a lower exposure dose, while the sidewalls are made through a larger exposure dose.…”

Section: Introductionmentioning

confidence: 99%

A two-step sealing-and-reinforcement SU8 bonding paradigm for the fabrication of shallow microchannels

Mehboudi

Yeom

2018

J. Micromech. Microeng.

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Adhesive bonding is a key technique to create microfluidic devices when two separate substrates are used to form microchannels. Among many adhesives explored in microchannel fabrication, SU8 has been widely used as an adhesive layer for sealing the microchannel sidewalls. The majority of the available SU8-based bonding methods, however, suffer from the difficulties associated with sealing of two important types of the microchannel architecture: (1) shallow microchannels with small patterns on a large area, and (2) microchannels with ultra-low aspect ratios (e.g. 6 mm in width and m in height). In this paper, a new bonding paradigm based upon the low-temperature and low-pressure SU8 bonding, consisting of two steps of sealing using a thin-SU8-coated PET film and bonding reinforcement using a SU8-coated glass slide, is proposed to resolve the aforementioned difficulties. Since it does not need complicated instruments such as a wafer bonding machine and a lamination device, the developed bonding paradigm is convenient and economical. We successfully demonstrate the compatibility of the proposed bonding paradigm with the two microchannel fabrication approaches based on the glass wet etching and the SU8 photo-lithography, where small microchannels with the innermost surfaces fully made of SU8 are obtained. A theoretical model is employed to better investigate the flow characteristics and the structural behavior of the microchannel including the PET film deformation, strain and von Mises stress distributions, bonding strength, etc. Moreover, we demonstrate the fabrication of the multi-height deep–shallow microchannel sidewalls and their sealing using the SU8-coated PET film. Finally, as a proof-of-concept device, a microfluidic filter consisting of the double-height deep–shallow microchannel is fabricated for separation of 3 µm and 10 µm particles.

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Fabrication of a transparent structured superomniphobic surface using a multiple partial expose method

Lee

Hsu

2017

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)

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Fabricating embedded SU-8 microstructures with asymmetric inside cross section by double-side multiple partial exposure method

Cited by 4 publications

References 11 publications

Integrated optofluidic-microfluidic twin channels: toward diverse application of lab-on-a-chip systems

Integrated optofluidic-microfluidic twin channels: toward diverse application of lab-on-a-chip systems

A two-step sealing-and-reinforcement SU8 bonding paradigm for the fabrication of shallow microchannels

Fabrication of a transparent structured superomniphobic surface using a multiple partial expose method

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