Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads

Ataman, Çağlar; Lani, Sébastien; Noell, Wilfried; Jutzi, F.; Bayat, Dara; Rooij, Nico de

doi:10.1109/memsys.2011.5734517

Cited by 3 publications

(1 citation statement)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This fabrication methodology would be promising for various applications since copper exhibits properties of low resistance, high current carrying capability and scalability which promote its ability to support high current density and viability for micro-devices [24][25][26][27][28].…”

Section: Introductionmentioning

confidence: 99%

Modification of a Substrate Roughness for a Fabrication of Freestanding Electroplated Metallic Microstructures

Pimpin

Srituravanich

2017

View full text Add to dashboard Cite

Abstract.This study aims to demonstrate a simple fabrication technique of freestanding electroplated metallic microstructures by modifying a substrate roughness. The proposed technique utilizes counter effects between two forces, i.e. an intrinsic force causing shrinkage in an electroplated metallic microstructure, and an adhesive force adhering a metallic microstructure to a substrate. With the modification of substrate roughness until the adhesive force becomes weaker than the induced intrinsic force, electroplated metallic microstructures would spontaneously release from the substrate after the electroplating process. Three parameters, i.e. substrate roughness, electroplated square structure's area and electroplated rectangular structure's width-to-length ratio, were experimentally studied. The results showed that the electroplated structure with a smaller size and smaller width-to-length ratio was more easily detached from the substrate for a given substrate roughness. In addition, for the same electroplated structure, a substrate with less roughness allowed a detachment of electroplated microstructure more easily.

show abstract

Section: Introductionmentioning

confidence: 99%

Modification of a Substrate Roughness for a Fabrication of Freestanding Electroplated Metallic Microstructures

Pimpin

Srituravanich

2017

View full text Add to dashboard Cite

show abstract

AlScN based MEMS quasi-static mirror matrix with large tilting angle and high linearity

Gu-Stoppel

Lisec

Fichtner

et al. 2020

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

Optical Modulators Based on Microfabricated Tilting Flaps Operating at low Actuation Voltages

Jutzi¹

2012

View full text Add to dashboard Cite

Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads

Cited by 3 publications

References 7 publications

Modification of a Substrate Roughness for a Fabrication of Freestanding Electroplated Metallic Microstructures

Modification of a Substrate Roughness for a Fabrication of Freestanding Electroplated Metallic Microstructures

AlScN based MEMS quasi-static mirror matrix with large tilting angle and high linearity

Optical Modulators Based on Microfabricated Tilting Flaps Operating at low Actuation Voltages

Contact Info

Product

Resources

About